JPS5333047A - Deflection device for electronic line - Google Patents

Deflection device for electronic line

Info

Publication number
JPS5333047A
JPS5333047A JP10675776A JP10675776A JPS5333047A JP S5333047 A JPS5333047 A JP S5333047A JP 10675776 A JP10675776 A JP 10675776A JP 10675776 A JP10675776 A JP 10675776A JP S5333047 A JPS5333047 A JP S5333047A
Authority
JP
Japan
Prior art keywords
deflection device
electronic line
deflection
magnification ratio
ratio range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10675776A
Other languages
Japanese (ja)
Inventor
Tadao Watabe
Shigeto Sunakozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10675776A priority Critical patent/JPS5333047A/en
Publication of JPS5333047A publication Critical patent/JPS5333047A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide two pairs of deflection device and thus to ensure a highefficiency scanning for a test sample over a wide range by applying the 2-stage deflection system for the high magnification ratio range and using 1-stage deflection system of high deflection sensitivity for the low magnification ratio range respectively.
COPYRIGHT: (C)1978,JPO&Japio
JP10675776A 1976-09-08 1976-09-08 Deflection device for electronic line Pending JPS5333047A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10675776A JPS5333047A (en) 1976-09-08 1976-09-08 Deflection device for electronic line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10675776A JPS5333047A (en) 1976-09-08 1976-09-08 Deflection device for electronic line

Publications (1)

Publication Number Publication Date
JPS5333047A true JPS5333047A (en) 1978-03-28

Family

ID=14441775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10675776A Pending JPS5333047A (en) 1976-09-08 1976-09-08 Deflection device for electronic line

Country Status (1)

Country Link
JP (1) JPS5333047A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138963A (en) * 1974-09-30 1976-03-31 Hitachi Ltd SOSADENSHIKENBIKYO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138963A (en) * 1974-09-30 1976-03-31 Hitachi Ltd SOSADENSHIKENBIKYO

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