JPS5333047A - Deflection device for electronic line - Google Patents
Deflection device for electronic lineInfo
- Publication number
- JPS5333047A JPS5333047A JP10675776A JP10675776A JPS5333047A JP S5333047 A JPS5333047 A JP S5333047A JP 10675776 A JP10675776 A JP 10675776A JP 10675776 A JP10675776 A JP 10675776A JP S5333047 A JPS5333047 A JP S5333047A
- Authority
- JP
- Japan
- Prior art keywords
- deflection device
- electronic line
- deflection
- magnification ratio
- ratio range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide two pairs of deflection device and thus to ensure a highefficiency scanning for a test sample over a wide range by applying the 2-stage deflection system for the high magnification ratio range and using 1-stage deflection system of high deflection sensitivity for the low magnification ratio range respectively.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10675776A JPS5333047A (en) | 1976-09-08 | 1976-09-08 | Deflection device for electronic line |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10675776A JPS5333047A (en) | 1976-09-08 | 1976-09-08 | Deflection device for electronic line |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5333047A true JPS5333047A (en) | 1978-03-28 |
Family
ID=14441775
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10675776A Pending JPS5333047A (en) | 1976-09-08 | 1976-09-08 | Deflection device for electronic line |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5333047A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5138963A (en) * | 1974-09-30 | 1976-03-31 | Hitachi Ltd | SOSADENSHIKENBIKYO |
-
1976
- 1976-09-08 JP JP10675776A patent/JPS5333047A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5138963A (en) * | 1974-09-30 | 1976-03-31 | Hitachi Ltd | SOSADENSHIKENBIKYO |
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