JPS5343596A - Microanalyzer of x ray and its similar device - Google Patents

Microanalyzer of x ray and its similar device

Info

Publication number
JPS5343596A
JPS5343596A JP11805176A JP11805176A JPS5343596A JP S5343596 A JPS5343596 A JP S5343596A JP 11805176 A JP11805176 A JP 11805176A JP 11805176 A JP11805176 A JP 11805176A JP S5343596 A JPS5343596 A JP S5343596A
Authority
JP
Japan
Prior art keywords
ray
microanalyzer
similar device
detector
installing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11805176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62451B2 (https=
Inventor
Hiroyoshi Soejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP11805176A priority Critical patent/JPS5343596A/ja
Publication of JPS5343596A publication Critical patent/JPS5343596A/ja
Publication of JPS62451B2 publication Critical patent/JPS62451B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP11805176A 1976-09-30 1976-09-30 Microanalyzer of x ray and its similar device Granted JPS5343596A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11805176A JPS5343596A (en) 1976-09-30 1976-09-30 Microanalyzer of x ray and its similar device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11805176A JPS5343596A (en) 1976-09-30 1976-09-30 Microanalyzer of x ray and its similar device

Publications (2)

Publication Number Publication Date
JPS5343596A true JPS5343596A (en) 1978-04-19
JPS62451B2 JPS62451B2 (https=) 1987-01-08

Family

ID=14726798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11805176A Granted JPS5343596A (en) 1976-09-30 1976-09-30 Microanalyzer of x ray and its similar device

Country Status (1)

Country Link
JP (1) JPS5343596A (https=)

Also Published As

Publication number Publication date
JPS62451B2 (https=) 1987-01-08

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