JPS5342683A - Vertical field effect transistor - Google Patents

Vertical field effect transistor

Info

Publication number
JPS5342683A
JPS5342683A JP11814576A JP11814576A JPS5342683A JP S5342683 A JPS5342683 A JP S5342683A JP 11814576 A JP11814576 A JP 11814576A JP 11814576 A JP11814576 A JP 11814576A JP S5342683 A JPS5342683 A JP S5342683A
Authority
JP
Japan
Prior art keywords
field effect
effect transistor
vertical field
fet
resistivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11814576A
Other languages
Japanese (ja)
Inventor
Yasunari Kajiwara
Genshiro Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11814576A priority Critical patent/JPS5342683A/en
Publication of JPS5342683A publication Critical patent/JPS5342683A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To make a high frequency vartical FET by making the resistivity of the semiconductor layer portions between gate and drain higher than the resistivity at the drain side portions of channels in a FET of a vertical type structure.
COPYRIGHT: (C)1978,JPO&Japio
JP11814576A 1976-09-30 1976-09-30 Vertical field effect transistor Pending JPS5342683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11814576A JPS5342683A (en) 1976-09-30 1976-09-30 Vertical field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11814576A JPS5342683A (en) 1976-09-30 1976-09-30 Vertical field effect transistor

Publications (1)

Publication Number Publication Date
JPS5342683A true JPS5342683A (en) 1978-04-18

Family

ID=14729180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11814576A Pending JPS5342683A (en) 1976-09-30 1976-09-30 Vertical field effect transistor

Country Status (1)

Country Link
JP (1) JPS5342683A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134282A (en) * 1973-04-25 1974-12-24
JPS50146277A (en) * 1974-05-13 1975-11-22
JPS5131183A (en) * 1974-09-10 1976-03-17 Nippon Electric Co DENRYOKUYODENKAIKOKATORANJISUTA

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134282A (en) * 1973-04-25 1974-12-24
JPS50146277A (en) * 1974-05-13 1975-11-22
JPS5131183A (en) * 1974-09-10 1976-03-17 Nippon Electric Co DENRYOKUYODENKAIKOKATORANJISUTA

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