JPS5341289A - Manufacturing apparatus of standard gas - Google Patents

Manufacturing apparatus of standard gas

Info

Publication number
JPS5341289A
JPS5341289A JP11543876A JP11543876A JPS5341289A JP S5341289 A JPS5341289 A JP S5341289A JP 11543876 A JP11543876 A JP 11543876A JP 11543876 A JP11543876 A JP 11543876A JP S5341289 A JPS5341289 A JP S5341289A
Authority
JP
Japan
Prior art keywords
standard gas
manufacturing apparatus
gas
tubular body
roduce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11543876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS545316B2 (en:Method
Inventor
Shigeo Matsui
Masayoshi Okamoto
Terunobu Hayata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11543876A priority Critical patent/JPS5341289A/ja
Publication of JPS5341289A publication Critical patent/JPS5341289A/ja
Publication of JPS545316B2 publication Critical patent/JPS545316B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP11543876A 1976-09-28 1976-09-28 Manufacturing apparatus of standard gas Granted JPS5341289A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11543876A JPS5341289A (en) 1976-09-28 1976-09-28 Manufacturing apparatus of standard gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11543876A JPS5341289A (en) 1976-09-28 1976-09-28 Manufacturing apparatus of standard gas

Publications (2)

Publication Number Publication Date
JPS5341289A true JPS5341289A (en) 1978-04-14
JPS545316B2 JPS545316B2 (en:Method) 1979-03-15

Family

ID=14662551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11543876A Granted JPS5341289A (en) 1976-09-28 1976-09-28 Manufacturing apparatus of standard gas

Country Status (1)

Country Link
JP (1) JPS5341289A (en:Method)

Also Published As

Publication number Publication date
JPS545316B2 (en:Method) 1979-03-15

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