JPS5341179A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS5341179A
JPS5341179A JP11544076A JP11544076A JPS5341179A JP S5341179 A JPS5341179 A JP S5341179A JP 11544076 A JP11544076 A JP 11544076A JP 11544076 A JP11544076 A JP 11544076A JP S5341179 A JPS5341179 A JP S5341179A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacture
mesa
aviod
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11544076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5638059B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Minoru Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11544076A priority Critical patent/JPS5341179A/ja
Publication of JPS5341179A publication Critical patent/JPS5341179A/ja
Publication of JPS5638059B2 publication Critical patent/JPS5638059B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP11544076A 1976-09-28 1976-09-28 Semiconductor device and its manufacture Granted JPS5341179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11544076A JPS5341179A (en) 1976-09-28 1976-09-28 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11544076A JPS5341179A (en) 1976-09-28 1976-09-28 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5341179A true JPS5341179A (en) 1978-04-14
JPS5638059B2 JPS5638059B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-09-03

Family

ID=14662602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11544076A Granted JPS5341179A (en) 1976-09-28 1976-09-28 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5341179A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-28 1976-01-13 Ibm

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-28 1976-01-13 Ibm

Also Published As

Publication number Publication date
JPS5638059B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-09-03

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