JPS5638059B2 - - Google Patents

Info

Publication number
JPS5638059B2
JPS5638059B2 JP11544076A JP11544076A JPS5638059B2 JP S5638059 B2 JPS5638059 B2 JP S5638059B2 JP 11544076 A JP11544076 A JP 11544076A JP 11544076 A JP11544076 A JP 11544076A JP S5638059 B2 JPS5638059 B2 JP S5638059B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11544076A
Other languages
Japanese (ja)
Other versions
JPS5341179A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11544076A priority Critical patent/JPS5341179A/ja
Publication of JPS5341179A publication Critical patent/JPS5341179A/ja
Publication of JPS5638059B2 publication Critical patent/JPS5638059B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP11544076A 1976-09-28 1976-09-28 Semiconductor device and its manufacture Granted JPS5341179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11544076A JPS5341179A (en) 1976-09-28 1976-09-28 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11544076A JPS5341179A (en) 1976-09-28 1976-09-28 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5341179A JPS5341179A (en) 1978-04-14
JPS5638059B2 true JPS5638059B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-09-03

Family

ID=14662602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11544076A Granted JPS5341179A (en) 1976-09-28 1976-09-28 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5341179A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3899363A (en) * 1974-06-28 1975-08-12 Ibm Method and device for reducing sidewall conduction in recessed oxide pet arrays

Also Published As

Publication number Publication date
JPS5341179A (en) 1978-04-14

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