JPS5338263A - Plasma treating apparatus of semiconductors - Google Patents

Plasma treating apparatus of semiconductors

Info

Publication number
JPS5338263A
JPS5338263A JP11243576A JP11243576A JPS5338263A JP S5338263 A JPS5338263 A JP S5338263A JP 11243576 A JP11243576 A JP 11243576A JP 11243576 A JP11243576 A JP 11243576A JP S5338263 A JPS5338263 A JP S5338263A
Authority
JP
Japan
Prior art keywords
plasma treating
semiconductors
treating apparatus
parting
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11243576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5329575B2 (online.php
Inventor
Sakae Takei
Masayuki Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11243576A priority Critical patent/JPS5338263A/ja
Publication of JPS5338263A publication Critical patent/JPS5338263A/ja
Publication of JPS5329575B2 publication Critical patent/JPS5329575B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP11243576A 1976-09-21 1976-09-21 Plasma treating apparatus of semiconductors Granted JPS5338263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11243576A JPS5338263A (en) 1976-09-21 1976-09-21 Plasma treating apparatus of semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11243576A JPS5338263A (en) 1976-09-21 1976-09-21 Plasma treating apparatus of semiconductors

Publications (2)

Publication Number Publication Date
JPS5338263A true JPS5338263A (en) 1978-04-08
JPS5329575B2 JPS5329575B2 (online.php) 1978-08-22

Family

ID=14586552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11243576A Granted JPS5338263A (en) 1976-09-21 1976-09-21 Plasma treating apparatus of semiconductors

Country Status (1)

Country Link
JP (1) JPS5338263A (online.php)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532792A (en) * 1982-09-08 1985-08-06 Maru Kikai Kogyo Co., Ltd. Apparatus for adjusting to tool length of panel forming machine
US4598568A (en) * 1983-11-19 1986-07-08 Heidelberger Druckmaschinen Ag Bending device for offset printing plates
US4843862A (en) * 1987-06-03 1989-07-04 Salvagnini Transferica S.P.A. Bending machine for sheet metal panels having a blank holder with uniform compression
JPH03232224A (ja) * 1990-02-07 1991-10-16 Mitsubishi Electric Corp プラズマ処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532792A (en) * 1982-09-08 1985-08-06 Maru Kikai Kogyo Co., Ltd. Apparatus for adjusting to tool length of panel forming machine
US4598568A (en) * 1983-11-19 1986-07-08 Heidelberger Druckmaschinen Ag Bending device for offset printing plates
US4843862A (en) * 1987-06-03 1989-07-04 Salvagnini Transferica S.P.A. Bending machine for sheet metal panels having a blank holder with uniform compression
JPH03232224A (ja) * 1990-02-07 1991-10-16 Mitsubishi Electric Corp プラズマ処理装置

Also Published As

Publication number Publication date
JPS5329575B2 (online.php) 1978-08-22

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