JPS5336470A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5336470A
JPS5336470A JP11078576A JP11078576A JPS5336470A JP S5336470 A JPS5336470 A JP S5336470A JP 11078576 A JP11078576 A JP 11078576A JP 11078576 A JP11078576 A JP 11078576A JP S5336470 A JPS5336470 A JP S5336470A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
psg
bipolar transistor
continuous holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11078576A
Other languages
Japanese (ja)
Other versions
JPS6058581B2 (en
Inventor
Isao Sakamoto
Yasutake Kuki
Akira Muramatsu
Kazuo Hoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11078576A priority Critical patent/JPS6058581B2/en
Publication of JPS5336470A publication Critical patent/JPS5336470A/en
Publication of JPS6058581B2 publication Critical patent/JPS6058581B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To obtain a device which can set a free concentration of PSG for the bipolar transistor coated with PSG and which has small continuous holes.
COPYRIGHT: (C)1978,JPO&Japio
JP11078576A 1976-09-17 1976-09-17 Manufacturing method of semiconductor device Expired JPS6058581B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11078576A JPS6058581B2 (en) 1976-09-17 1976-09-17 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11078576A JPS6058581B2 (en) 1976-09-17 1976-09-17 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5336470A true JPS5336470A (en) 1978-04-04
JPS6058581B2 JPS6058581B2 (en) 1985-12-20

Family

ID=14544554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11078576A Expired JPS6058581B2 (en) 1976-09-17 1976-09-17 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6058581B2 (en)

Also Published As

Publication number Publication date
JPS6058581B2 (en) 1985-12-20

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