JPS5331972A - Positioning method of two plate form bodies - Google Patents

Positioning method of two plate form bodies

Info

Publication number
JPS5331972A
JPS5331972A JP10600276A JP10600276A JPS5331972A JP S5331972 A JPS5331972 A JP S5331972A JP 10600276 A JP10600276 A JP 10600276A JP 10600276 A JP10600276 A JP 10600276A JP S5331972 A JPS5331972 A JP S5331972A
Authority
JP
Japan
Prior art keywords
form bodies
plate form
positioning method
moving base
bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10600276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5540177B2 (enrdf_load_stackoverflow
Inventor
Sunao Ishihara
Nobuyuki Takeuchi
Kazue Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10600276A priority Critical patent/JPS5331972A/ja
Publication of JPS5331972A publication Critical patent/JPS5331972A/ja
Publication of JPS5540177B2 publication Critical patent/JPS5540177B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP10600276A 1976-09-05 1976-09-05 Positioning method of two plate form bodies Granted JPS5331972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10600276A JPS5331972A (en) 1976-09-05 1976-09-05 Positioning method of two plate form bodies

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10600276A JPS5331972A (en) 1976-09-05 1976-09-05 Positioning method of two plate form bodies

Publications (2)

Publication Number Publication Date
JPS5331972A true JPS5331972A (en) 1978-03-25
JPS5540177B2 JPS5540177B2 (enrdf_load_stackoverflow) 1980-10-16

Family

ID=14422475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10600276A Granted JPS5331972A (en) 1976-09-05 1976-09-05 Positioning method of two plate form bodies

Country Status (1)

Country Link
JP (1) JPS5331972A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831526A (ja) * 1981-08-19 1983-02-24 Nippon Kogaku Kk <Nikon> 焼付装置のアライメント装置
JPS6342913A (ja) * 1986-08-11 1988-02-24 Kuraray Co Ltd 異収縮混繊糸の製造法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792259A (en) * 1980-11-26 1982-06-08 Yamaichi Yamagishi Shiyouten K Tatami mat

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831526A (ja) * 1981-08-19 1983-02-24 Nippon Kogaku Kk <Nikon> 焼付装置のアライメント装置
JPS6342913A (ja) * 1986-08-11 1988-02-24 Kuraray Co Ltd 異収縮混繊糸の製造法

Also Published As

Publication number Publication date
JPS5540177B2 (enrdf_load_stackoverflow) 1980-10-16

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