JPS5331581A - Coating method of tube inside by ion beam - Google Patents

Coating method of tube inside by ion beam

Info

Publication number
JPS5331581A
JPS5331581A JP10629376A JP10629376A JPS5331581A JP S5331581 A JPS5331581 A JP S5331581A JP 10629376 A JP10629376 A JP 10629376A JP 10629376 A JP10629376 A JP 10629376A JP S5331581 A JPS5331581 A JP S5331581A
Authority
JP
Japan
Prior art keywords
coating method
ion beam
tube inside
small diameter
diameter tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10629376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5515546B2 (enrdf_load_stackoverflow
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP10629376A priority Critical patent/JPS5331581A/ja
Publication of JPS5331581A publication Critical patent/JPS5331581A/ja
Publication of JPS5515546B2 publication Critical patent/JPS5515546B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP10629376A 1976-09-07 1976-09-07 Coating method of tube inside by ion beam Granted JPS5331581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10629376A JPS5331581A (en) 1976-09-07 1976-09-07 Coating method of tube inside by ion beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10629376A JPS5331581A (en) 1976-09-07 1976-09-07 Coating method of tube inside by ion beam

Publications (2)

Publication Number Publication Date
JPS5331581A true JPS5331581A (en) 1978-03-24
JPS5515546B2 JPS5515546B2 (enrdf_load_stackoverflow) 1980-04-24

Family

ID=14429996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10629376A Granted JPS5331581A (en) 1976-09-07 1976-09-07 Coating method of tube inside by ion beam

Country Status (1)

Country Link
JP (1) JPS5331581A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144472A (ja) * 1982-02-22 1983-08-27 Hitachi Ltd イオンプレ−テイング装置
JP2008223112A (ja) * 2007-03-15 2008-09-25 Stanley Electric Co Ltd プラズマ処理装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973385A (enrdf_load_stackoverflow) * 1972-11-15 1974-07-16
JPS5016120U (enrdf_load_stackoverflow) * 1973-06-13 1975-02-20
JPS5036381A (enrdf_load_stackoverflow) * 1973-08-04 1975-04-05

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973385A (enrdf_load_stackoverflow) * 1972-11-15 1974-07-16
JPS5016120U (enrdf_load_stackoverflow) * 1973-06-13 1975-02-20
JPS5036381A (enrdf_load_stackoverflow) * 1973-08-04 1975-04-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144472A (ja) * 1982-02-22 1983-08-27 Hitachi Ltd イオンプレ−テイング装置
JP2008223112A (ja) * 2007-03-15 2008-09-25 Stanley Electric Co Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPS5515546B2 (enrdf_load_stackoverflow) 1980-04-24

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