JPS5036381A - - Google Patents

Info

Publication number
JPS5036381A
JPS5036381A JP8824773A JP8824773A JPS5036381A JP S5036381 A JPS5036381 A JP S5036381A JP 8824773 A JP8824773 A JP 8824773A JP 8824773 A JP8824773 A JP 8824773A JP S5036381 A JPS5036381 A JP S5036381A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8824773A
Other languages
Japanese (ja)
Other versions
JPS5318184B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8824773A priority Critical patent/JPS5318184B2/ja
Publication of JPS5036381A publication Critical patent/JPS5036381A/ja
Publication of JPS5318184B2 publication Critical patent/JPS5318184B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8824773A 1973-08-04 1973-08-04 Expired JPS5318184B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8824773A JPS5318184B2 (enrdf_load_stackoverflow) 1973-08-04 1973-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8824773A JPS5318184B2 (enrdf_load_stackoverflow) 1973-08-04 1973-08-04

Publications (2)

Publication Number Publication Date
JPS5036381A true JPS5036381A (enrdf_load_stackoverflow) 1975-04-05
JPS5318184B2 JPS5318184B2 (enrdf_load_stackoverflow) 1978-06-13

Family

ID=13937512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8824773A Expired JPS5318184B2 (enrdf_load_stackoverflow) 1973-08-04 1973-08-04

Country Status (1)

Country Link
JP (1) JPS5318184B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331581A (en) * 1976-09-07 1978-03-24 Ulvac Corp Coating method of tube inside by ion beam
JPS60200957A (ja) * 1984-03-26 1985-10-11 Futaba Corp イオンビ−ム蒸着装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952186A (enrdf_load_stackoverflow) * 1972-06-16 1974-05-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952186A (enrdf_load_stackoverflow) * 1972-06-16 1974-05-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331581A (en) * 1976-09-07 1978-03-24 Ulvac Corp Coating method of tube inside by ion beam
JPS60200957A (ja) * 1984-03-26 1985-10-11 Futaba Corp イオンビ−ム蒸着装置

Also Published As

Publication number Publication date
JPS5318184B2 (enrdf_load_stackoverflow) 1978-06-13

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