JPS5325244A - Method of plasma etching molybdenum - Google Patents
Method of plasma etching molybdenumInfo
- Publication number
- JPS5325244A JPS5325244A JP9936876A JP9936876A JPS5325244A JP S5325244 A JPS5325244 A JP S5325244A JP 9936876 A JP9936876 A JP 9936876A JP 9936876 A JP9936876 A JP 9936876A JP S5325244 A JPS5325244 A JP S5325244A
- Authority
- JP
- Japan
- Prior art keywords
- plasma etching
- etching molybdenum
- molybdenum
- plasma
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9936876A JPS5325244A (en) | 1976-08-20 | 1976-08-20 | Method of plasma etching molybdenum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9936876A JPS5325244A (en) | 1976-08-20 | 1976-08-20 | Method of plasma etching molybdenum |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5325244A true JPS5325244A (en) | 1978-03-08 |
JPS5743148B2 JPS5743148B2 (US07413550-20080819-C00001.png) | 1982-09-13 |
Family
ID=14245597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9936876A Granted JPS5325244A (en) | 1976-08-20 | 1976-08-20 | Method of plasma etching molybdenum |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5325244A (US07413550-20080819-C00001.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5726171A (en) * | 1980-07-24 | 1982-02-12 | Nec Corp | Dry etching method for molybdenum |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4975270A (US07413550-20080819-C00001.png) * | 1972-11-22 | 1974-07-19 |
-
1976
- 1976-08-20 JP JP9936876A patent/JPS5325244A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4975270A (US07413550-20080819-C00001.png) * | 1972-11-22 | 1974-07-19 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5726171A (en) * | 1980-07-24 | 1982-02-12 | Nec Corp | Dry etching method for molybdenum |
Also Published As
Publication number | Publication date |
---|---|
JPS5743148B2 (US07413550-20080819-C00001.png) | 1982-09-13 |
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