JPS5325244A - Method of plasma etching molybdenum - Google Patents

Method of plasma etching molybdenum

Info

Publication number
JPS5325244A
JPS5325244A JP9936876A JP9936876A JPS5325244A JP S5325244 A JPS5325244 A JP S5325244A JP 9936876 A JP9936876 A JP 9936876A JP 9936876 A JP9936876 A JP 9936876A JP S5325244 A JPS5325244 A JP S5325244A
Authority
JP
Japan
Prior art keywords
plasma etching
etching molybdenum
molybdenum
plasma
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9936876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5743148B2 (US07413550-20080819-C00001.png
Inventor
Katsuzou Ukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDEN VARIAN KK
Original Assignee
NICHIDEN VARIAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDEN VARIAN KK filed Critical NICHIDEN VARIAN KK
Priority to JP9936876A priority Critical patent/JPS5325244A/ja
Publication of JPS5325244A publication Critical patent/JPS5325244A/ja
Publication of JPS5743148B2 publication Critical patent/JPS5743148B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP9936876A 1976-08-20 1976-08-20 Method of plasma etching molybdenum Granted JPS5325244A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9936876A JPS5325244A (en) 1976-08-20 1976-08-20 Method of plasma etching molybdenum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9936876A JPS5325244A (en) 1976-08-20 1976-08-20 Method of plasma etching molybdenum

Publications (2)

Publication Number Publication Date
JPS5325244A true JPS5325244A (en) 1978-03-08
JPS5743148B2 JPS5743148B2 (US07413550-20080819-C00001.png) 1982-09-13

Family

ID=14245597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9936876A Granted JPS5325244A (en) 1976-08-20 1976-08-20 Method of plasma etching molybdenum

Country Status (1)

Country Link
JP (1) JPS5325244A (US07413550-20080819-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726171A (en) * 1980-07-24 1982-02-12 Nec Corp Dry etching method for molybdenum

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4975270A (US07413550-20080819-C00001.png) * 1972-11-22 1974-07-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4975270A (US07413550-20080819-C00001.png) * 1972-11-22 1974-07-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726171A (en) * 1980-07-24 1982-02-12 Nec Corp Dry etching method for molybdenum

Also Published As

Publication number Publication date
JPS5743148B2 (US07413550-20080819-C00001.png) 1982-09-13

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