JPS5323663B1 - - Google Patents
Info
- Publication number
- JPS5323663B1 JPS5323663B1 JP2233871A JP2233871A JPS5323663B1 JP S5323663 B1 JPS5323663 B1 JP S5323663B1 JP 2233871 A JP2233871 A JP 2233871A JP 2233871 A JP2233871 A JP 2233871A JP S5323663 B1 JPS5323663 B1 JP S5323663B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2233871A JPS5323663B1 (de) | 1971-04-12 | 1971-04-12 | |
| US00243215A US3786268A (en) | 1971-04-12 | 1972-04-12 | Electron gun device of field emission type |
| NL7204863.A NL155979B (nl) | 1971-04-12 | 1972-04-12 | Elektronenkanon van het veldemissie-type. |
| DE19722217660 DE2217660A1 (de) | 1971-04-12 | 1972-04-12 | Elektronenkanone des Feldemissionstyps |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2233871A JPS5323663B1 (de) | 1971-04-12 | 1971-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5323663B1 true JPS5323663B1 (de) | 1978-07-15 |
Family
ID=12079897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2233871A Pending JPS5323663B1 (de) | 1971-04-12 | 1971-04-12 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3786268A (de) |
| JP (1) | JPS5323663B1 (de) |
| DE (1) | DE2217660A1 (de) |
| NL (1) | NL155979B (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007073521A (ja) * | 2005-09-05 | 2007-03-22 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5420828B2 (de) * | 1972-06-09 | 1979-07-25 | ||
| DE2851743C2 (de) * | 1978-11-30 | 1980-08-28 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | ElektronenstoBspektrometer |
| JPS57191950A (en) * | 1981-05-22 | 1982-11-25 | Hitachi Ltd | Charged-particle source |
| WO1987004846A1 (en) * | 1986-02-03 | 1987-08-13 | Crewe Albert V | Electron beam memory system with ultra-compact, high current density electron gun |
| US4740705A (en) * | 1986-08-11 | 1988-04-26 | Electron Beam Memories | Axially compact field emission cathode assembly |
| US4760567A (en) * | 1986-08-11 | 1988-07-26 | Electron Beam Memories | Electron beam memory system with ultra-compact, high current density electron gun |
| JP3131339B2 (ja) * | 1993-12-22 | 2001-01-31 | 三菱電機株式会社 | 陰極、陰極線管および陰極線管の作動方法 |
| US5848118A (en) * | 1997-06-19 | 1998-12-08 | Lear Corporation | Method and apparatus for detecting inhomogeneities in seat assemblies |
| FR2792770A1 (fr) | 1999-04-22 | 2000-10-27 | Cit Alcatel | Fonctionnement a haute pression d'une cathode froide a emission de champ |
| WO2009153939A1 (ja) | 2008-06-20 | 2009-12-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、及びその制御方法 |
| US8188451B1 (en) * | 2008-09-24 | 2012-05-29 | Kla-Tencor Corporation | Electron generation and delivery system for contamination sensitive emitters |
| EP2365511B1 (de) * | 2010-03-10 | 2013-05-08 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Rückkopplungsschleife für eine Emitter Blitzreinigung |
| JP6345273B2 (ja) | 2014-12-26 | 2018-06-20 | 株式会社日立ハイテクノロジーズ | 複合荷電粒子線装置およびその制御方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1246744A (en) * | 1969-01-02 | 1971-09-15 | Graham Stuart Plows | Electron beam apparatus |
-
1971
- 1971-04-12 JP JP2233871A patent/JPS5323663B1/ja active Pending
-
1972
- 1972-04-12 US US00243215A patent/US3786268A/en not_active Expired - Lifetime
- 1972-04-12 DE DE19722217660 patent/DE2217660A1/de active Pending
- 1972-04-12 NL NL7204863.A patent/NL155979B/xx not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007073521A (ja) * | 2005-09-05 | 2007-03-22 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法 |
| JP2009117394A (ja) * | 2005-09-05 | 2009-05-28 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7204863A (de) | 1972-10-16 |
| US3786268A (en) | 1974-01-15 |
| NL155979B (nl) | 1978-02-15 |
| DE2217660A1 (de) | 1972-11-16 |