JPS5322020B2 - - Google Patents
Info
- Publication number
- JPS5322020B2 JPS5322020B2 JP7241574A JP7241574A JPS5322020B2 JP S5322020 B2 JPS5322020 B2 JP S5322020B2 JP 7241574 A JP7241574 A JP 7241574A JP 7241574 A JP7241574 A JP 7241574A JP S5322020 B2 JPS5322020 B2 JP S5322020B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70375—Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US376918A US3881098A (en) | 1973-07-05 | 1973-07-05 | Photoexposure system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5039424A JPS5039424A (ja) | 1975-04-11 |
JPS5322020B2 true JPS5322020B2 (ja) | 1978-07-06 |
Family
ID=23487033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7241574A Expired JPS5322020B2 (ja) | 1973-07-05 | 1974-06-26 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3881098A (ja) |
JP (1) | JPS5322020B2 (ja) |
DE (1) | DE2432476B2 (ja) |
FR (1) | FR2236208B1 (ja) |
GB (1) | GB1468608A (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50105000A (ja) * | 1974-01-24 | 1975-08-19 | ||
US4110762A (en) * | 1974-05-10 | 1978-08-29 | Commissariat A L'energie Atomique | Drawing machines especially for integrated circuit masks |
JPS5828116B2 (ja) * | 1977-09-26 | 1983-06-14 | 株式会社写研 | 陰極線表示管の表示位置制御方法 |
US4231659A (en) * | 1979-04-11 | 1980-11-04 | The Gerber Scientific Instrument Company | Method of making an overlay mask and a printing plate therefrom |
US4385360A (en) * | 1980-08-04 | 1983-05-24 | Micro-Power Computer Systems | Computer-controlled reproduction device |
DE3033637A1 (de) * | 1980-09-06 | 1982-04-22 | Magnetdruck Steenken & Co, 2900 Oldenburg | Elektronische steuerung der industriellen produktion von plastik-ausweiskarten |
SE449531B (sv) * | 1980-12-11 | 1987-05-04 | Gerhard Westerberg | Forfarande och anordning for kontroll av mikromasker |
JPS57180128A (en) * | 1981-04-30 | 1982-11-06 | Toshiba Corp | Equipment for electron beam exposure |
US4364056A (en) * | 1981-06-15 | 1982-12-14 | Yokogawa Electric Works, Ltd. | Interactive graphic system |
JPS5958586A (ja) * | 1982-09-28 | 1984-04-04 | Toshiba Mach Co Ltd | マスクの検査方法および装置 |
EP0120089A4 (en) * | 1982-09-30 | 1985-06-10 | Storage Technology Partners | AUTOMATICALLY ADJUSTABLE CHIP DESIGN PROCEDURE. |
US4500182A (en) * | 1982-12-27 | 1985-02-19 | Nicolet Instrument Corporation | Photoplotter |
US4720798A (en) * | 1985-04-16 | 1988-01-19 | Protocad, Inc. | Process for use in rapidly producing printed circuit boards using a computer controlled plotter |
US4926348A (en) * | 1986-12-05 | 1990-05-15 | Royal Melbourne Institute Of Technology Limited | Plotting apparatus using a light source moved on a photosensitive surface |
US5539667A (en) * | 1992-09-15 | 1996-07-23 | Gcc Technologies | Method and apparatus for improved digital film recorder |
DE102006008080A1 (de) * | 2006-02-22 | 2007-08-30 | Kleo Maschinenbau Ag | Belichtungsanlage |
DE102010010071A1 (de) * | 2010-02-26 | 2011-09-01 | Bundesdruckerei Gmbh | Markierungsvorrichtung und Verfahren zum Markieren von Wert- oder Sicherheitsdokumenten unter Verwendung von Lichtleitfasern |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3273476A (en) * | 1964-05-04 | 1966-09-20 | Rca Corp | Photocomposing system |
US3555177A (en) * | 1967-07-03 | 1971-01-12 | Honeywell Inc | Video recorder having an adapter to receive and modify video input signals for application to a cathode ray tube recording device |
US3527978A (en) * | 1967-11-16 | 1970-09-08 | Control Image Corp | Film produced by automatic generation and display of animated figures |
US3587418A (en) * | 1968-04-26 | 1971-06-28 | Eastman Kodak Co | Arrangement for forming code marks |
US3537788A (en) * | 1968-06-19 | 1970-11-03 | Xerox Corp | Automatic discrimination technique for selective photocopying |
US3673936A (en) * | 1970-04-27 | 1972-07-04 | J James Stone Jr | Image copying apparatus |
US3763365A (en) * | 1972-01-21 | 1973-10-02 | Evans & Sutherland Computer Co | Computer graphics matrix multiplier |
-
1973
- 1973-07-05 US US376918A patent/US3881098A/en not_active Expired - Lifetime
-
1974
- 1974-05-20 GB GB2238774A patent/GB1468608A/en not_active Expired
- 1974-06-26 JP JP7241574A patent/JPS5322020B2/ja not_active Expired
- 1974-07-02 DE DE19742432476 patent/DE2432476B2/de not_active Withdrawn
- 1974-07-04 FR FR7423266A patent/FR2236208B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2432476B2 (de) | 1977-01-13 |
DE2432476A1 (de) | 1975-01-23 |
GB1468608A (en) | 1977-03-30 |
JPS5039424A (ja) | 1975-04-11 |
FR2236208B1 (ja) | 1979-05-25 |
FR2236208A1 (ja) | 1975-01-31 |
US3881098A (en) | 1975-04-29 |