JPS5319765A - Irradiation method of x-rays - Google Patents

Irradiation method of x-rays

Info

Publication number
JPS5319765A
JPS5319765A JP9425276A JP9425276A JPS5319765A JP S5319765 A JPS5319765 A JP S5319765A JP 9425276 A JP9425276 A JP 9425276A JP 9425276 A JP9425276 A JP 9425276A JP S5319765 A JPS5319765 A JP S5319765A
Authority
JP
Japan
Prior art keywords
rays
irradiated
irradiation method
ray source
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9425276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5410827B2 (enExample
Inventor
Koji Ito
Yuichiro Takayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9425276A priority Critical patent/JPS5319765A/ja
Publication of JPS5319765A publication Critical patent/JPS5319765A/ja
Publication of JPS5410827B2 publication Critical patent/JPS5410827B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9425276A 1976-08-06 1976-08-06 Irradiation method of x-rays Granted JPS5319765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9425276A JPS5319765A (en) 1976-08-06 1976-08-06 Irradiation method of x-rays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9425276A JPS5319765A (en) 1976-08-06 1976-08-06 Irradiation method of x-rays

Publications (2)

Publication Number Publication Date
JPS5319765A true JPS5319765A (en) 1978-02-23
JPS5410827B2 JPS5410827B2 (enExample) 1979-05-10

Family

ID=14105096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9425276A Granted JPS5319765A (en) 1976-08-06 1976-08-06 Irradiation method of x-rays

Country Status (1)

Country Link
JP (1) JPS5319765A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4882778A (enExample) * 1972-01-14 1973-11-05
JPS50120270A (enExample) * 1974-02-15 1975-09-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4882778A (enExample) * 1972-01-14 1973-11-05
JPS50120270A (enExample) * 1974-02-15 1975-09-20

Also Published As

Publication number Publication date
JPS5410827B2 (enExample) 1979-05-10

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