JPS5410827B2 - - Google Patents
Info
- Publication number
- JPS5410827B2 JPS5410827B2 JP9425276A JP9425276A JPS5410827B2 JP S5410827 B2 JPS5410827 B2 JP S5410827B2 JP 9425276 A JP9425276 A JP 9425276A JP 9425276 A JP9425276 A JP 9425276A JP S5410827 B2 JPS5410827 B2 JP S5410827B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9425276A JPS5319765A (en) | 1976-08-06 | 1976-08-06 | Irradiation method of x-rays |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9425276A JPS5319765A (en) | 1976-08-06 | 1976-08-06 | Irradiation method of x-rays |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5319765A JPS5319765A (en) | 1978-02-23 |
| JPS5410827B2 true JPS5410827B2 (enExample) | 1979-05-10 |
Family
ID=14105096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9425276A Granted JPS5319765A (en) | 1976-08-06 | 1976-08-06 | Irradiation method of x-rays |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5319765A (enExample) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3743842A (en) * | 1972-01-14 | 1973-07-03 | Massachusetts Inst Technology | Soft x-ray lithographic apparatus and process |
| US3892973A (en) * | 1974-02-15 | 1975-07-01 | Bell Telephone Labor Inc | Mask structure for X-ray lithography |
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1976
- 1976-08-06 JP JP9425276A patent/JPS5319765A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5319765A (en) | 1978-02-23 |