JPS5319765A - Irradiation method of x-rays - Google Patents
Irradiation method of x-raysInfo
- Publication number
- JPS5319765A JPS5319765A JP9425276A JP9425276A JPS5319765A JP S5319765 A JPS5319765 A JP S5319765A JP 9425276 A JP9425276 A JP 9425276A JP 9425276 A JP9425276 A JP 9425276A JP S5319765 A JPS5319765 A JP S5319765A
- Authority
- JP
- Japan
- Prior art keywords
- rays
- irradiated
- irradiation method
- ray source
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To lessen the power and time for irradiation required per one body to be irradiated by arranging the body to be irradiated by X-rays on the same spherical plane on the center of which is disposed a X-ray source, disposing the X-ray source vertically of the plane of the body to be irradiated and irradiating a plurality of such bodies.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9425276A JPS5319765A (en) | 1976-08-06 | 1976-08-06 | Irradiation method of x-rays |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9425276A JPS5319765A (en) | 1976-08-06 | 1976-08-06 | Irradiation method of x-rays |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5319765A true JPS5319765A (en) | 1978-02-23 |
JPS5410827B2 JPS5410827B2 (en) | 1979-05-10 |
Family
ID=14105096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9425276A Granted JPS5319765A (en) | 1976-08-06 | 1976-08-06 | Irradiation method of x-rays |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5319765A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6223550Y2 (en) * | 1979-11-19 | 1987-06-16 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4882778A (en) * | 1972-01-14 | 1973-11-05 | ||
JPS50120270A (en) * | 1974-02-15 | 1975-09-20 |
-
1976
- 1976-08-06 JP JP9425276A patent/JPS5319765A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4882778A (en) * | 1972-01-14 | 1973-11-05 | ||
JPS50120270A (en) * | 1974-02-15 | 1975-09-20 |
Also Published As
Publication number | Publication date |
---|---|
JPS5410827B2 (en) | 1979-05-10 |
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