JPS5319764A - Mark detection system in electron beam exposure - Google Patents
Mark detection system in electron beam exposureInfo
- Publication number
- JPS5319764A JPS5319764A JP9404776A JP9404776A JPS5319764A JP S5319764 A JPS5319764 A JP S5319764A JP 9404776 A JP9404776 A JP 9404776A JP 9404776 A JP9404776 A JP 9404776A JP S5319764 A JPS5319764 A JP S5319764A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- detection system
- beam exposure
- mark detection
- mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9404776A JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9404776A JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5319764A true JPS5319764A (en) | 1978-02-23 |
JPS5346694B2 JPS5346694B2 (sv) | 1978-12-15 |
Family
ID=14099638
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9404776A Granted JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5319764A (sv) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56162837A (en) * | 1980-05-20 | 1981-12-15 | Nec Corp | Electron beam exposure device |
JPS5783175A (en) * | 1980-11-12 | 1982-05-24 | Mitsubishi Electric Corp | Phase rotation change-over device for inverter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023782A (sv) * | 1973-06-08 | 1975-03-14 |
-
1976
- 1976-08-09 JP JP9404776A patent/JPS5319764A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023782A (sv) * | 1973-06-08 | 1975-03-14 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56162837A (en) * | 1980-05-20 | 1981-12-15 | Nec Corp | Electron beam exposure device |
JPS5783175A (en) * | 1980-11-12 | 1982-05-24 | Mitsubishi Electric Corp | Phase rotation change-over device for inverter |
Also Published As
Publication number | Publication date |
---|---|
JPS5346694B2 (sv) | 1978-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51140488A (en) | Mask alignment device | |
JPS51147179A (en) | Method of munufacturing of semiconductor device | |
JPS5211774A (en) | Method of detecting relative position of patterns | |
JPS5351736A (en) | Film sensitivity presetting system for exposure condition determining circuit | |
JPS5357760A (en) | Electron beam exposure apparatus | |
JPS5319764A (en) | Mark detection system in electron beam exposure | |
JPS52155985A (en) | Semiconductor device | |
JPS5326674A (en) | Plasma etching | |
JPS5360221A (en) | Foot keyboard device of electronic musical instrument | |
JPS5218170A (en) | Position detection method | |
JPS51136289A (en) | Semi-conductor producing | |
JPS5227699A (en) | Coin inspection circuit | |
JPS53105381A (en) | X-ray copying mask | |
JPS5339158A (en) | Object shape information generating system | |
JPS5227390A (en) | Electrode wiring formation system of semiconductor device | |
JPS5319763A (en) | Mark detector in electron beam exposure | |
JPS5365668A (en) | Electron beam exposure device | |
JPS51136437A (en) | A process for inspecting signal quality | |
JPS5340299A (en) | Over-input alarming device | |
JPS534933A (en) | Collition avoidance device | |
JPS5315074A (en) | Mask alignment method | |
JPS5347821A (en) | Microfish locator | |
JPS5222678A (en) | Method to obtaining position control signal | |
JPS5272257A (en) | Multiple point type liquid level device | |
JPS5345808A (en) | Device for stopping vehicle at predetermined position |