JPS5315077A - Electron beam deflection controlling apparatus - Google Patents

Electron beam deflection controlling apparatus

Info

Publication number
JPS5315077A
JPS5315077A JP8905676A JP8905676A JPS5315077A JP S5315077 A JPS5315077 A JP S5315077A JP 8905676 A JP8905676 A JP 8905676A JP 8905676 A JP8905676 A JP 8905676A JP S5315077 A JPS5315077 A JP S5315077A
Authority
JP
Japan
Prior art keywords
electron beam
beam deflection
controlling apparatus
deflection controlling
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8905676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5334468B2 (enrdf_load_stackoverflow
Inventor
Atsushi Iwata
Akihira Fujinami
Akinori Shibayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8905676A priority Critical patent/JPS5315077A/ja
Publication of JPS5315077A publication Critical patent/JPS5315077A/ja
Publication of JPS5334468B2 publication Critical patent/JPS5334468B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP8905676A 1976-07-28 1976-07-28 Electron beam deflection controlling apparatus Granted JPS5315077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8905676A JPS5315077A (en) 1976-07-28 1976-07-28 Electron beam deflection controlling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8905676A JPS5315077A (en) 1976-07-28 1976-07-28 Electron beam deflection controlling apparatus

Publications (2)

Publication Number Publication Date
JPS5315077A true JPS5315077A (en) 1978-02-10
JPS5334468B2 JPS5334468B2 (enrdf_load_stackoverflow) 1978-09-20

Family

ID=13960191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8905676A Granted JPS5315077A (en) 1976-07-28 1976-07-28 Electron beam deflection controlling apparatus

Country Status (1)

Country Link
JP (1) JPS5315077A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622617U (enrdf_load_stackoverflow) * 1985-06-24 1987-01-09
JPH0254411U (enrdf_load_stackoverflow) * 1988-10-14 1990-04-19

Also Published As

Publication number Publication date
JPS5334468B2 (enrdf_load_stackoverflow) 1978-09-20

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