JPS53137099A - Production of titanium nitride - Google Patents

Production of titanium nitride

Info

Publication number
JPS53137099A
JPS53137099A JP5125277A JP5125277A JPS53137099A JP S53137099 A JPS53137099 A JP S53137099A JP 5125277 A JP5125277 A JP 5125277A JP 5125277 A JP5125277 A JP 5125277A JP S53137099 A JPS53137099 A JP S53137099A
Authority
JP
Japan
Prior art keywords
production
titanium nitride
step reaction
temp
tin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5125277A
Other languages
Japanese (ja)
Other versions
JPS5619285B2 (en
Inventor
Tadaki Mori
Yoshihide Oishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Toyo Soda Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Soda Manufacturing Co Ltd filed Critical Toyo Soda Manufacturing Co Ltd
Priority to JP5125277A priority Critical patent/JPS53137099A/en
Publication of JPS53137099A publication Critical patent/JPS53137099A/en
Publication of JPS5619285B2 publication Critical patent/JPS5619285B2/ja
Granted legal-status Critical Current

Links

Landscapes

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Abstract

PURPOSE: To produce high purity TiN in a high yield by carrying out first step reaction of a titanium halide and Al or an Al-Ti alloy in a nitrogen-contg. atmosphere at a temp. where TiN is formed and AlN is not formed, followed by second step reaction at a higher temp. than the above one.
COPYRIGHT: (C)1978,JPO&Japio
JP5125277A 1977-05-06 1977-05-06 Production of titanium nitride Granted JPS53137099A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5125277A JPS53137099A (en) 1977-05-06 1977-05-06 Production of titanium nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5125277A JPS53137099A (en) 1977-05-06 1977-05-06 Production of titanium nitride

Publications (2)

Publication Number Publication Date
JPS53137099A true JPS53137099A (en) 1978-11-30
JPS5619285B2 JPS5619285B2 (en) 1981-05-07

Family

ID=12881750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5125277A Granted JPS53137099A (en) 1977-05-06 1977-05-06 Production of titanium nitride

Country Status (1)

Country Link
JP (1) JPS53137099A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017169584A1 (en) * 2016-03-31 2017-10-05 富士フイルム株式会社 Composition, cured film, color filter, light-blocking film, solid-state imaging element and image display device
WO2018061583A1 (en) * 2016-09-29 2018-04-05 富士フイルム株式会社 Composition, cured film, color filter, solid-state imaging element, infrared sensor, near-infrared sensor, and proximity sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100959931B1 (en) * 2008-03-07 2010-05-26 한국과학기술연구원 Method of forming titanium nitride powders

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017169584A1 (en) * 2016-03-31 2017-10-05 富士フイルム株式会社 Composition, cured film, color filter, light-blocking film, solid-state imaging element and image display device
KR20180116354A (en) * 2016-03-31 2018-10-24 후지필름 가부시키가이샤 Composition, a cured film, a color filter, a light-shielding film, a solid-state image pickup device and an image display device
CN109073799A (en) * 2016-03-31 2018-12-21 富士胶片株式会社 Composition, cured film, colour filter, photomask, solid-state imager and image display device
JPWO2017169584A1 (en) * 2016-03-31 2019-01-17 富士フイルム株式会社 Composition, cured film, color filter, light-shielding film, solid-state imaging device, and image display device
CN109073799B (en) * 2016-03-31 2021-03-09 富士胶片株式会社 Composition, cured film, color filter, light-shielding film, solid-state imaging element, and image display device
CN113031398A (en) * 2016-03-31 2021-06-25 富士胶片株式会社 Composition, cured film, color filter, light-shielding film, solid-state imaging element, and image display device
TWI790993B (en) * 2016-03-31 2023-02-01 日商富士軟片股份有限公司 Black composition, cured film, color filter, light-shielding film, solid-state imaging element, and image display device
WO2018061583A1 (en) * 2016-09-29 2018-04-05 富士フイルム株式会社 Composition, cured film, color filter, solid-state imaging element, infrared sensor, near-infrared sensor, and proximity sensor
JPWO2018061583A1 (en) * 2016-09-29 2019-06-24 富士フイルム株式会社 Composition, cured film, color filter, solid-state image sensor, infrared sensor, near infrared sensor, and proximity sensor

Also Published As

Publication number Publication date
JPS5619285B2 (en) 1981-05-07

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