JPS53129964A - Method and device for inserting and taking out of heat treatment jig - Google Patents

Method and device for inserting and taking out of heat treatment jig

Info

Publication number
JPS53129964A
JPS53129964A JP4445677A JP4445677A JPS53129964A JP S53129964 A JPS53129964 A JP S53129964A JP 4445677 A JP4445677 A JP 4445677A JP 4445677 A JP4445677 A JP 4445677A JP S53129964 A JPS53129964 A JP S53129964A
Authority
JP
Japan
Prior art keywords
heat treatment
taking out
treatment jig
jig
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4445677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS623571B2 (enrdf_load_stackoverflow
Inventor
Masakuni Akiba
Hiroto Nagatomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4445677A priority Critical patent/JPS53129964A/ja
Publication of JPS53129964A publication Critical patent/JPS53129964A/ja
Publication of JPS623571B2 publication Critical patent/JPS623571B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
JP4445677A 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig Granted JPS53129964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4445677A JPS53129964A (en) 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4445677A JPS53129964A (en) 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig

Related Child Applications (4)

Application Number Title Priority Date Filing Date
JP22201283A Division JPS59130421A (ja) 1983-11-28 1983-11-28 熱処理治具の插入取出し用治具
JP22201183A Division JPS59130420A (ja) 1983-11-28 1983-11-28 熱処理治具の插入取出し装置
JP27888184A Division JPS60167322A (ja) 1984-12-28 1984-12-28 半導体ウエハの熱処理方法
JP27888284A Division JPS60167323A (ja) 1984-12-28 1984-12-28 横型半導体ウエハ・バツチ処理装置

Publications (2)

Publication Number Publication Date
JPS53129964A true JPS53129964A (en) 1978-11-13
JPS623571B2 JPS623571B2 (enrdf_load_stackoverflow) 1987-01-26

Family

ID=12691982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4445677A Granted JPS53129964A (en) 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig

Country Status (1)

Country Link
JP (1) JPS53129964A (enrdf_load_stackoverflow)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54157080A (en) * 1978-05-31 1979-12-11 Mitsubishi Electric Corp Semiconductor device
JPS5636129A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Method and device for heat treatment of semiconductor thin plate
JPS57178440U (enrdf_load_stackoverflow) * 1981-05-06 1982-11-11
JPS5885523A (ja) * 1981-11-17 1983-05-21 Nec Home Electronics Ltd 半導体製造装置
US4440538A (en) * 1981-12-30 1984-04-03 Atomel Products Corporation Apparatus for loading and unloading a furnace
JPS59154017A (ja) * 1983-02-22 1984-09-03 Mitsubishi Electric Corp 半導体ウエハの加熱炉用パドル
JPS6079714A (ja) * 1983-10-06 1985-05-07 Rohm Co Ltd 拡散炉
JPS6095920A (ja) * 1983-10-05 1985-05-29 アドヴアンスト　セミコンダクター　マテイリアルズ　アメリカ　インコーポレーテツド 物品取扱い装置及び方法
JPS6078137U (ja) * 1983-11-02 1985-05-31 信越石英株式会社 ウエ−ハ搬送装置
JPS60140817A (ja) * 1983-12-28 1985-07-25 Fujitsu Ltd 半導体装置の製造方法
JPS60167322A (ja) * 1984-12-28 1985-08-30 Hitachi Ltd 半導体ウエハの熱処理方法
JPS6173322A (ja) * 1984-09-18 1986-04-15 Toshiba Corp 熱処理炉
JPS61184821A (ja) * 1985-09-30 1986-08-18 Chiyou Lsi Gijutsu Kenkyu Kumiai 熱処理装置
JPS61184822A (ja) * 1985-09-30 1986-08-18 Chiyou Lsi Gijutsu Kenkyu Kumiai 熱処理方法
US4620832A (en) * 1984-03-07 1986-11-04 Motion Manufacturing, Inc. Furnace loading system
US4952108A (en) * 1988-02-20 1990-08-28 Foss Heraeus Analysensysteme Gmbh Apparatus for automatically feeding a sequence of crucibles to a test oven

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54157080A (en) * 1978-05-31 1979-12-11 Mitsubishi Electric Corp Semiconductor device
JPS5636129A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Method and device for heat treatment of semiconductor thin plate
JPS57178440U (enrdf_load_stackoverflow) * 1981-05-06 1982-11-11
JPS5885523A (ja) * 1981-11-17 1983-05-21 Nec Home Electronics Ltd 半導体製造装置
US4440538A (en) * 1981-12-30 1984-04-03 Atomel Products Corporation Apparatus for loading and unloading a furnace
JPS59154017A (ja) * 1983-02-22 1984-09-03 Mitsubishi Electric Corp 半導体ウエハの加熱炉用パドル
JPS6095920A (ja) * 1983-10-05 1985-05-29 アドヴアンスト　セミコンダクター　マテイリアルズ　アメリカ　インコーポレーテツド 物品取扱い装置及び方法
JPS6079714A (ja) * 1983-10-06 1985-05-07 Rohm Co Ltd 拡散炉
JPS6078137U (ja) * 1983-11-02 1985-05-31 信越石英株式会社 ウエ−ハ搬送装置
JPS60140817A (ja) * 1983-12-28 1985-07-25 Fujitsu Ltd 半導体装置の製造方法
US4620832A (en) * 1984-03-07 1986-11-04 Motion Manufacturing, Inc. Furnace loading system
JPS6173322A (ja) * 1984-09-18 1986-04-15 Toshiba Corp 熱処理炉
JPS60167322A (ja) * 1984-12-28 1985-08-30 Hitachi Ltd 半導体ウエハの熱処理方法
JPS61184821A (ja) * 1985-09-30 1986-08-18 Chiyou Lsi Gijutsu Kenkyu Kumiai 熱処理装置
JPS61184822A (ja) * 1985-09-30 1986-08-18 Chiyou Lsi Gijutsu Kenkyu Kumiai 熱処理方法
US4952108A (en) * 1988-02-20 1990-08-28 Foss Heraeus Analysensysteme Gmbh Apparatus for automatically feeding a sequence of crucibles to a test oven

Also Published As

Publication number Publication date
JPS623571B2 (enrdf_load_stackoverflow) 1987-01-26

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