JPS53121573A - Manufacture of semiconductor - Google Patents
Manufacture of semiconductorInfo
- Publication number
- JPS53121573A JPS53121573A JP3643977A JP3643977A JPS53121573A JP S53121573 A JPS53121573 A JP S53121573A JP 3643977 A JP3643977 A JP 3643977A JP 3643977 A JP3643977 A JP 3643977A JP S53121573 A JPS53121573 A JP S53121573A
- Authority
- JP
- Japan
- Prior art keywords
- esist
- spectrum
- semiconductor
- manufacture
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To ensure a high-accuracy patterning of the esist film by preventing the occurrence of the standing wave which features a large amplitude variation in the resist film and securing a constant product between each spectrum of the incident rays and the esist sensitivity to the spectrum.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3643977A JPS53121573A (en) | 1977-03-31 | 1977-03-31 | Manufacture of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3643977A JPS53121573A (en) | 1977-03-31 | 1977-03-31 | Manufacture of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53121573A true JPS53121573A (en) | 1978-10-24 |
Family
ID=12469836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3643977A Pending JPS53121573A (en) | 1977-03-31 | 1977-03-31 | Manufacture of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53121573A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03190217A (en) * | 1989-12-20 | 1991-08-20 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
US7325472B2 (en) | 2003-01-15 | 2008-02-05 | Tokyo Automatic Machinery Works, Ltd. | Film cutting device |
-
1977
- 1977-03-31 JP JP3643977A patent/JPS53121573A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03190217A (en) * | 1989-12-20 | 1991-08-20 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
US7325472B2 (en) | 2003-01-15 | 2008-02-05 | Tokyo Automatic Machinery Works, Ltd. | Film cutting device |
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