JPS53121573A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS53121573A
JPS53121573A JP3643977A JP3643977A JPS53121573A JP S53121573 A JPS53121573 A JP S53121573A JP 3643977 A JP3643977 A JP 3643977A JP 3643977 A JP3643977 A JP 3643977A JP S53121573 A JPS53121573 A JP S53121573A
Authority
JP
Japan
Prior art keywords
esist
spectrum
semiconductor
manufacture
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3643977A
Other languages
Japanese (ja)
Inventor
Kenji Sugishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3643977A priority Critical patent/JPS53121573A/en
Publication of JPS53121573A publication Critical patent/JPS53121573A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To ensure a high-accuracy patterning of the esist film by preventing the occurrence of the standing wave which features a large amplitude variation in the resist film and securing a constant product between each spectrum of the incident rays and the esist sensitivity to the spectrum.
COPYRIGHT: (C)1978,JPO&Japio
JP3643977A 1977-03-31 1977-03-31 Manufacture of semiconductor Pending JPS53121573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3643977A JPS53121573A (en) 1977-03-31 1977-03-31 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3643977A JPS53121573A (en) 1977-03-31 1977-03-31 Manufacture of semiconductor

Publications (1)

Publication Number Publication Date
JPS53121573A true JPS53121573A (en) 1978-10-24

Family

ID=12469836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3643977A Pending JPS53121573A (en) 1977-03-31 1977-03-31 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS53121573A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03190217A (en) * 1989-12-20 1991-08-20 Mitsubishi Electric Corp Manufacture of semiconductor device
US7325472B2 (en) 2003-01-15 2008-02-05 Tokyo Automatic Machinery Works, Ltd. Film cutting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03190217A (en) * 1989-12-20 1991-08-20 Mitsubishi Electric Corp Manufacture of semiconductor device
US7325472B2 (en) 2003-01-15 2008-02-05 Tokyo Automatic Machinery Works, Ltd. Film cutting device

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