JPS5311574A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5311574A
JPS5311574A JP8613676A JP8613676A JPS5311574A JP S5311574 A JPS5311574 A JP S5311574A JP 8613676 A JP8613676 A JP 8613676A JP 8613676 A JP8613676 A JP 8613676A JP S5311574 A JPS5311574 A JP S5311574A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wafers
arsenide
impurity sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8613676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5722209B2 (enrdf_load_html_response
Inventor
Ichiro Sudo
Saburo Ishiguro
Haruo Shimoda
Kazufumi Nakayama
Mikio Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Furukawa Mining Co Ltd
Furukawa Kogyo Co Ltd
Original Assignee
Fujitsu Ltd
Furukawa Mining Co Ltd
Furukawa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Furukawa Mining Co Ltd, Furukawa Kogyo Co Ltd filed Critical Fujitsu Ltd
Priority to JP8613676A priority Critical patent/JPS5311574A/ja
Publication of JPS5311574A publication Critical patent/JPS5311574A/ja
Publication of JPS5722209B2 publication Critical patent/JPS5722209B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP8613676A 1976-07-19 1976-07-19 Production of semiconductor device Granted JPS5311574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8613676A JPS5311574A (en) 1976-07-19 1976-07-19 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8613676A JPS5311574A (en) 1976-07-19 1976-07-19 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5311574A true JPS5311574A (en) 1978-02-02
JPS5722209B2 JPS5722209B2 (enrdf_load_html_response) 1982-05-12

Family

ID=13878290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8613676A Granted JPS5311574A (en) 1976-07-19 1976-07-19 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5311574A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5459075A (en) * 1977-10-19 1979-05-12 Nec Corp Diffusing method of impurity
US4431475A (en) * 1981-04-29 1984-02-14 Consortium Fur Elektrochemische Industrie Gmbh Process for making doped semiconductors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5459075A (en) * 1977-10-19 1979-05-12 Nec Corp Diffusing method of impurity
US4431475A (en) * 1981-04-29 1984-02-14 Consortium Fur Elektrochemische Industrie Gmbh Process for making doped semiconductors

Also Published As

Publication number Publication date
JPS5722209B2 (enrdf_load_html_response) 1982-05-12

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