JPS53114661A - Ion source of penning discharge type - Google Patents

Ion source of penning discharge type

Info

Publication number
JPS53114661A
JPS53114661A JP2859877A JP2859877A JPS53114661A JP S53114661 A JPS53114661 A JP S53114661A JP 2859877 A JP2859877 A JP 2859877A JP 2859877 A JP2859877 A JP 2859877A JP S53114661 A JPS53114661 A JP S53114661A
Authority
JP
Japan
Prior art keywords
ion source
discharge type
penning discharge
penning
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2859877A
Other languages
Japanese (ja)
Inventor
Masashi Iimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2859877A priority Critical patent/JPS53114661A/en
Publication of JPS53114661A publication Critical patent/JPS53114661A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Abstract

PURPOSE:To make easy assembling and disassembling, by self-holding the anode electrode, magnet stator, and slit stator in an ionized chamber.
JP2859877A 1977-03-17 1977-03-17 Ion source of penning discharge type Pending JPS53114661A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2859877A JPS53114661A (en) 1977-03-17 1977-03-17 Ion source of penning discharge type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2859877A JPS53114661A (en) 1977-03-17 1977-03-17 Ion source of penning discharge type

Publications (1)

Publication Number Publication Date
JPS53114661A true JPS53114661A (en) 1978-10-06

Family

ID=12253016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2859877A Pending JPS53114661A (en) 1977-03-17 1977-03-17 Ion source of penning discharge type

Country Status (1)

Country Link
JP (1) JPS53114661A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220019827A (en) 2019-08-28 2022-02-17 주식회사 히타치하이테크 Ion gun and ion milling device
KR20230151011A (en) 2021-05-19 2023-10-31 주식회사 히타치하이테크 ion milling device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220019827A (en) 2019-08-28 2022-02-17 주식회사 히타치하이테크 Ion gun and ion milling device
KR20230151011A (en) 2021-05-19 2023-10-31 주식회사 히타치하이테크 ion milling device

Similar Documents

Publication Publication Date Title
JPS5343594A (en) Ion source for chemical ionization
JPS53114661A (en) Ion source of penning discharge type
JPS5365657A (en) Gas discharge display panel
JPS5381289A (en) Ion-molecule reaction mass spectrometer
JPS5776185A (en) Sputtering device
JPS5437076A (en) Sputtering
JPS5337588A (en) Sputtering electrode
JPS5269262A (en) Plasma display panel
JPS51122787A (en) Insulating spacer
JPS5222991A (en) Method of controlling plasma type ion source
JPS5292473A (en) Main lens electric field forming method of inline type 3 beam electron gun
JPS5260661A (en) Watch with calculator
JPS5292791A (en) Smoke detector of ionization type
JPS528297A (en) Ion generator
JPS5237734A (en) Reference electric potential generator circuit
JPS56158940A (en) Constant current type electron capturing device
JPS5211759A (en) Gas discharge display panel
GB814750A (en) Improvements in or relating to rotary electric components
GB1507087A (en) Extractor ion source
JPS51141688A (en) Mass spectrometer
JPS5425147A (en) Flip flop circuit
JPS5217752A (en) One end earthing type btl amplifier circuit
JPS51118949A (en) Electrode assembling device of cathode-ray tube
JPS5379776A (en) Sputtering apparatus
JPS52128193A (en) Ionic source for mass spectrometer and its production

Legal Events

Date Code Title Description
TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Effective date: 20050906

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Effective date: 20050919

Free format text: JAPANESE INTERMEDIATE CODE: A61

R150 Certificate of patent (=grant) or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091007

Year of fee payment: 4

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101007

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101007

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 6

Free format text: PAYMENT UNTIL: 20111007

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 7

Free format text: PAYMENT UNTIL: 20121007

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 7

Free format text: PAYMENT UNTIL: 20121007

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131007

Year of fee payment: 8