JPS5296867A - Semiconductor unit and its manufacture - Google Patents
Semiconductor unit and its manufactureInfo
- Publication number
- JPS5296867A JPS5296867A JP1345076A JP1345076A JPS5296867A JP S5296867 A JPS5296867 A JP S5296867A JP 1345076 A JP1345076 A JP 1345076A JP 1345076 A JP1345076 A JP 1345076A JP S5296867 A JPS5296867 A JP S5296867A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor unit
- layers
- beam evaporation
- electronic beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/034—Manufacturing methods by blanket deposition of the material of the bonding area
- H01L2224/03444—Manufacturing methods by blanket deposition of the material of the bonding area in gaseous form
- H01L2224/0345—Physical vapour deposition [PVD], e.g. evaporation, or sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01024—Chromium [Cr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1345076A JPS5296867A (en) | 1976-02-10 | 1976-02-10 | Semiconductor unit and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1345076A JPS5296867A (en) | 1976-02-10 | 1976-02-10 | Semiconductor unit and its manufacture |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14262579A Division JPS55108733A (en) | 1979-11-01 | 1979-11-01 | Method of manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5296867A true JPS5296867A (en) | 1977-08-15 |
JPS5518049B2 JPS5518049B2 (US07494231-20090224-C00006.png) | 1980-05-16 |
Family
ID=11833465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1345076A Granted JPS5296867A (en) | 1976-02-10 | 1976-02-10 | Semiconductor unit and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5296867A (US07494231-20090224-C00006.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62172032U (US07494231-20090224-C00006.png) * | 1986-03-25 | 1987-10-31 |
-
1976
- 1976-02-10 JP JP1345076A patent/JPS5296867A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5518049B2 (US07494231-20090224-C00006.png) | 1980-05-16 |
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