JPS5288361A - Measuring method using interferometer - Google Patents

Measuring method using interferometer

Info

Publication number
JPS5288361A
JPS5288361A JP527476A JP527476A JPS5288361A JP S5288361 A JPS5288361 A JP S5288361A JP 527476 A JP527476 A JP 527476A JP 527476 A JP527476 A JP 527476A JP S5288361 A JPS5288361 A JP S5288361A
Authority
JP
Japan
Prior art keywords
interferometer
measuring method
erased
arranging
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP527476A
Other languages
English (en)
Other versions
JPS6024403B2 (ja
Inventor
Tetsuo Kuwayama
Nobuyoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP51005274A priority Critical patent/JPS6024403B2/ja
Publication of JPS5288361A publication Critical patent/JPS5288361A/ja
Publication of JPS6024403B2 publication Critical patent/JPS6024403B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP51005274A 1976-01-19 1976-01-19 干渉計を使用した測定法 Expired JPS6024403B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51005274A JPS6024403B2 (ja) 1976-01-19 1976-01-19 干渉計を使用した測定法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51005274A JPS6024403B2 (ja) 1976-01-19 1976-01-19 干渉計を使用した測定法

Publications (2)

Publication Number Publication Date
JPS5288361A true JPS5288361A (en) 1977-07-23
JPS6024403B2 JPS6024403B2 (ja) 1985-06-12

Family

ID=11606644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51005274A Expired JPS6024403B2 (ja) 1976-01-19 1976-01-19 干渉計を使用した測定法

Country Status (1)

Country Link
JP (1) JPS6024403B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012122768A (ja) * 2010-12-06 2012-06-28 National Central Univ 光学マルチ波長インターフェロメトリーを使用した薄膜素子測定方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49109060A (ja) * 1973-01-12 1974-10-17
JPS508668A (ja) * 1973-05-29 1975-01-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49109060A (ja) * 1973-01-12 1974-10-17
JPS508668A (ja) * 1973-05-29 1975-01-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012122768A (ja) * 2010-12-06 2012-06-28 National Central Univ 光学マルチ波長インターフェロメトリーを使用した薄膜素子測定方法

Also Published As

Publication number Publication date
JPS6024403B2 (ja) 1985-06-12

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