JPS5288361A - Measuring method using interferometer - Google Patents
Measuring method using interferometerInfo
- Publication number
- JPS5288361A JPS5288361A JP527476A JP527476A JPS5288361A JP S5288361 A JPS5288361 A JP S5288361A JP 527476 A JP527476 A JP 527476A JP 527476 A JP527476 A JP 527476A JP S5288361 A JPS5288361 A JP S5288361A
- Authority
- JP
- Japan
- Prior art keywords
- interferometer
- measuring method
- erased
- arranging
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51005274A JPS6024403B2 (ja) | 1976-01-19 | 1976-01-19 | 干渉計を使用した測定法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51005274A JPS6024403B2 (ja) | 1976-01-19 | 1976-01-19 | 干渉計を使用した測定法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5288361A true JPS5288361A (en) | 1977-07-23 |
JPS6024403B2 JPS6024403B2 (ja) | 1985-06-12 |
Family
ID=11606644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51005274A Expired JPS6024403B2 (ja) | 1976-01-19 | 1976-01-19 | 干渉計を使用した測定法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6024403B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012122768A (ja) * | 2010-12-06 | 2012-06-28 | National Central Univ | 光学マルチ波長インターフェロメトリーを使用した薄膜素子測定方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49109060A (ja) * | 1973-01-12 | 1974-10-17 | ||
JPS508668A (ja) * | 1973-05-29 | 1975-01-29 |
-
1976
- 1976-01-19 JP JP51005274A patent/JPS6024403B2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49109060A (ja) * | 1973-01-12 | 1974-10-17 | ||
JPS508668A (ja) * | 1973-05-29 | 1975-01-29 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012122768A (ja) * | 2010-12-06 | 2012-06-28 | National Central Univ | 光学マルチ波長インターフェロメトリーを使用した薄膜素子測定方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6024403B2 (ja) | 1985-06-12 |
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