JPS5288360A - Measuring method using interferometer - Google Patents

Measuring method using interferometer

Info

Publication number
JPS5288360A
JPS5288360A JP527376A JP527376A JPS5288360A JP S5288360 A JPS5288360 A JP S5288360A JP 527376 A JP527376 A JP 527376A JP 527376 A JP527376 A JP 527376A JP S5288360 A JPS5288360 A JP S5288360A
Authority
JP
Japan
Prior art keywords
interferometer
measuring method
erased
arranging
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP527376A
Other languages
English (en)
Other versions
JPS569643B2 (ja
Inventor
Tetsuo Kuwayama
Nobuyoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP527376A priority Critical patent/JPS5288360A/ja
Publication of JPS5288360A publication Critical patent/JPS5288360A/ja
Publication of JPS569643B2 publication Critical patent/JPS569643B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP527376A 1976-01-19 1976-01-19 Measuring method using interferometer Granted JPS5288360A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP527376A JPS5288360A (en) 1976-01-19 1976-01-19 Measuring method using interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP527376A JPS5288360A (en) 1976-01-19 1976-01-19 Measuring method using interferometer

Publications (2)

Publication Number Publication Date
JPS5288360A true JPS5288360A (en) 1977-07-23
JPS569643B2 JPS569643B2 (ja) 1981-03-03

Family

ID=11606613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP527376A Granted JPS5288360A (en) 1976-01-19 1976-01-19 Measuring method using interferometer

Country Status (1)

Country Link
JP (1) JPS5288360A (ja)

Also Published As

Publication number Publication date
JPS569643B2 (ja) 1981-03-03

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