JPS5284963A - Supporting body for substrate to be treated for vapor growth apparatus - Google Patents

Supporting body for substrate to be treated for vapor growth apparatus

Info

Publication number
JPS5284963A
JPS5284963A JP78976A JP78976A JPS5284963A JP S5284963 A JPS5284963 A JP S5284963A JP 78976 A JP78976 A JP 78976A JP 78976 A JP78976 A JP 78976A JP S5284963 A JPS5284963 A JP S5284963A
Authority
JP
Japan
Prior art keywords
treated
substrate
supporting body
growth apparatus
vapor growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP78976A
Other languages
Japanese (ja)
Inventor
Sadao Yasuda
Akira Kanai
Mitsuru Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP78976A priority Critical patent/JPS5284963A/en
Publication of JPS5284963A publication Critical patent/JPS5284963A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To facilitate the removal of the substrates being treated and prevent breakage and residual strain at the cooling by providing serration to the outside cir cumference of the rests on which the substrates to be treated are placed.
JP78976A 1976-01-07 1976-01-07 Supporting body for substrate to be treated for vapor growth apparatus Pending JPS5284963A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP78976A JPS5284963A (en) 1976-01-07 1976-01-07 Supporting body for substrate to be treated for vapor growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP78976A JPS5284963A (en) 1976-01-07 1976-01-07 Supporting body for substrate to be treated for vapor growth apparatus

Publications (1)

Publication Number Publication Date
JPS5284963A true JPS5284963A (en) 1977-07-14

Family

ID=11483447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP78976A Pending JPS5284963A (en) 1976-01-07 1976-01-07 Supporting body for substrate to be treated for vapor growth apparatus

Country Status (1)

Country Link
JP (1) JPS5284963A (en)

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