JPS5275171A - Method of mirror-surface cutting of semiconductor - Google Patents

Method of mirror-surface cutting of semiconductor

Info

Publication number
JPS5275171A
JPS5275171A JP15058375A JP15058375A JPS5275171A JP S5275171 A JPS5275171 A JP S5275171A JP 15058375 A JP15058375 A JP 15058375A JP 15058375 A JP15058375 A JP 15058375A JP S5275171 A JPS5275171 A JP S5275171A
Authority
JP
Japan
Prior art keywords
mirror
semiconductor
surface cutting
bonding
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15058375A
Other languages
Japanese (ja)
Inventor
Kazuhiko Nagayama
Yuji Ochiai
Noriyoshi Arakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15058375A priority Critical patent/JPS5275171A/en
Publication of JPS5275171A publication Critical patent/JPS5275171A/en
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

PURPOSE: To prevent the decrease in the cutting quality of grindstone and finish cut faces to a mirror surface by bonding several sheets of semiconductor materials using a bonding agent prepared by mixing fine powder of a suitable hardness to a given bonding resin, then cutting the bonded material.
COPYRIGHT: (C)1977,JPO&Japio
JP15058375A 1975-12-19 1975-12-19 Method of mirror-surface cutting of semiconductor Pending JPS5275171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15058375A JPS5275171A (en) 1975-12-19 1975-12-19 Method of mirror-surface cutting of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15058375A JPS5275171A (en) 1975-12-19 1975-12-19 Method of mirror-surface cutting of semiconductor

Publications (1)

Publication Number Publication Date
JPS5275171A true JPS5275171A (en) 1977-06-23

Family

ID=15500047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15058375A Pending JPS5275171A (en) 1975-12-19 1975-12-19 Method of mirror-surface cutting of semiconductor

Country Status (1)

Country Link
JP (1) JPS5275171A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4826064A (en) * 1971-08-06 1973-04-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4826064A (en) * 1971-08-06 1973-04-05

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