JPS5327367A - Polisher - Google Patents

Polisher

Info

Publication number
JPS5327367A
JPS5327367A JP10203076A JP10203076A JPS5327367A JP S5327367 A JPS5327367 A JP S5327367A JP 10203076 A JP10203076 A JP 10203076A JP 10203076 A JP10203076 A JP 10203076A JP S5327367 A JPS5327367 A JP S5327367A
Authority
JP
Japan
Prior art keywords
polisher
solidifying
dissolve
mixing
working fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10203076A
Other languages
Japanese (ja)
Other versions
JPS564386B2 (en
Inventor
Yoshiyuki Ueno
Shojiro Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10203076A priority Critical patent/JPS5327367A/en
Publication of JPS5327367A publication Critical patent/JPS5327367A/en
Publication of JPS564386B2 publication Critical patent/JPS564386B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE: To make a polisher of less work-hardened layer at high accuracy by mixing and solidifying minute particles which dissolve in polishing working fluid and high molecular materials which do not.
COPYRIGHT: (C)1978,JPO&Japio
JP10203076A 1976-08-26 1976-08-26 Polisher Granted JPS5327367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10203076A JPS5327367A (en) 1976-08-26 1976-08-26 Polisher

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10203076A JPS5327367A (en) 1976-08-26 1976-08-26 Polisher

Publications (2)

Publication Number Publication Date
JPS5327367A true JPS5327367A (en) 1978-03-14
JPS564386B2 JPS564386B2 (en) 1981-01-29

Family

ID=14316348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10203076A Granted JPS5327367A (en) 1976-08-26 1976-08-26 Polisher

Country Status (1)

Country Link
JP (1) JPS5327367A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58208416A (en) * 1982-05-28 1983-12-05 Asahi Chem Ind Co Ltd Preparation of highly oriented polyester filament
JPS58208415A (en) * 1982-05-28 1983-12-05 Asahi Chem Ind Co Ltd Easily dyeable polyethylene terephthalate fiber
JPS6269819A (en) * 1985-09-19 1987-03-31 Teijin Ltd Polyester fiber
JP2007184638A (en) * 2007-03-26 2007-07-19 Rohm & Haas Electronic Materials Cmp Holdings Inc Method of manufacturing polishing pad

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58208416A (en) * 1982-05-28 1983-12-05 Asahi Chem Ind Co Ltd Preparation of highly oriented polyester filament
JPS58208415A (en) * 1982-05-28 1983-12-05 Asahi Chem Ind Co Ltd Easily dyeable polyethylene terephthalate fiber
JPH0433887B2 (en) * 1982-05-28 1992-06-04 Asahi Chemical Ind
JPH0447045B2 (en) * 1982-05-28 1992-07-31 Asahi Chemical Ind
JPS6269819A (en) * 1985-09-19 1987-03-31 Teijin Ltd Polyester fiber
JP2007184638A (en) * 2007-03-26 2007-07-19 Rohm & Haas Electronic Materials Cmp Holdings Inc Method of manufacturing polishing pad

Also Published As

Publication number Publication date
JPS564386B2 (en) 1981-01-29

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