JPS5269575A - Organic body residuum detection method - Google Patents

Organic body residuum detection method

Info

Publication number
JPS5269575A
JPS5269575A JP14513375A JP14513375A JPS5269575A JP S5269575 A JPS5269575 A JP S5269575A JP 14513375 A JP14513375 A JP 14513375A JP 14513375 A JP14513375 A JP 14513375A JP S5269575 A JPS5269575 A JP S5269575A
Authority
JP
Japan
Prior art keywords
residuum
organic body
detection method
organic
existence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14513375A
Other languages
Japanese (ja)
Inventor
Hiroshi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14513375A priority Critical patent/JPS5269575A/en
Publication of JPS5269575A publication Critical patent/JPS5269575A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The existence of organic body residuum is simply checked in a short time by use of gas plasma etching equipment in the photo resist process in which organic body is handled.
COPYRIGHT: (C)1977,JPO&Japio
JP14513375A 1975-12-08 1975-12-08 Organic body residuum detection method Pending JPS5269575A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14513375A JPS5269575A (en) 1975-12-08 1975-12-08 Organic body residuum detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14513375A JPS5269575A (en) 1975-12-08 1975-12-08 Organic body residuum detection method

Publications (1)

Publication Number Publication Date
JPS5269575A true JPS5269575A (en) 1977-06-09

Family

ID=15378160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14513375A Pending JPS5269575A (en) 1975-12-08 1975-12-08 Organic body residuum detection method

Country Status (1)

Country Link
JP (1) JPS5269575A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61289712A (en) * 1985-06-18 1986-12-19 Fujitsu Ltd Gain control circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61289712A (en) * 1985-06-18 1986-12-19 Fujitsu Ltd Gain control circuit
JPH0681000B2 (en) * 1985-06-18 1994-10-12 富士通株式会社 Gain control circuit

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