JPS5269575A - Organic body residuum detection method - Google Patents
Organic body residuum detection methodInfo
- Publication number
- JPS5269575A JPS5269575A JP14513375A JP14513375A JPS5269575A JP S5269575 A JPS5269575 A JP S5269575A JP 14513375 A JP14513375 A JP 14513375A JP 14513375 A JP14513375 A JP 14513375A JP S5269575 A JPS5269575 A JP S5269575A
- Authority
- JP
- Japan
- Prior art keywords
- residuum
- organic body
- detection method
- organic
- existence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: The existence of organic body residuum is simply checked in a short time by use of gas plasma etching equipment in the photo resist process in which organic body is handled.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14513375A JPS5269575A (en) | 1975-12-08 | 1975-12-08 | Organic body residuum detection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14513375A JPS5269575A (en) | 1975-12-08 | 1975-12-08 | Organic body residuum detection method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5269575A true JPS5269575A (en) | 1977-06-09 |
Family
ID=15378160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14513375A Pending JPS5269575A (en) | 1975-12-08 | 1975-12-08 | Organic body residuum detection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5269575A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61289712A (en) * | 1985-06-18 | 1986-12-19 | Fujitsu Ltd | Gain control circuit |
-
1975
- 1975-12-08 JP JP14513375A patent/JPS5269575A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61289712A (en) * | 1985-06-18 | 1986-12-19 | Fujitsu Ltd | Gain control circuit |
JPH0681000B2 (en) * | 1985-06-18 | 1994-10-12 | 富士通株式会社 | Gain control circuit |
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