JPS5268384A - Evaporation source - Google Patents
Evaporation sourceInfo
- Publication number
- JPS5268384A JPS5268384A JP14398475A JP14398475A JPS5268384A JP S5268384 A JPS5268384 A JP S5268384A JP 14398475 A JP14398475 A JP 14398475A JP 14398475 A JP14398475 A JP 14398475A JP S5268384 A JPS5268384 A JP S5268384A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- onto
- evaporation
- boat
- putting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Conductive Materials (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To secure stabilized Si evaporation by adhering metal film onto at least one surface of Si and by putting it onto a boat through heating.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14398475A JPS5268384A (en) | 1975-12-05 | 1975-12-05 | Evaporation source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14398475A JPS5268384A (en) | 1975-12-05 | 1975-12-05 | Evaporation source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5268384A true JPS5268384A (en) | 1977-06-07 |
Family
ID=15351595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14398475A Pending JPS5268384A (en) | 1975-12-05 | 1975-12-05 | Evaporation source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5268384A (en) |
-
1975
- 1975-12-05 JP JP14398475A patent/JPS5268384A/en active Pending
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