JPS5268384A - Evaporation source - Google Patents

Evaporation source

Info

Publication number
JPS5268384A
JPS5268384A JP14398475A JP14398475A JPS5268384A JP S5268384 A JPS5268384 A JP S5268384A JP 14398475 A JP14398475 A JP 14398475A JP 14398475 A JP14398475 A JP 14398475A JP S5268384 A JPS5268384 A JP S5268384A
Authority
JP
Japan
Prior art keywords
evaporation source
onto
evaporation
boat
putting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14398475A
Other languages
Japanese (ja)
Inventor
Sadayuki Okudaira
Keizo Suzuki
Kazuyoshi Ueki
Naoki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14398475A priority Critical patent/JPS5268384A/en
Publication of JPS5268384A publication Critical patent/JPS5268384A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Conductive Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To secure stabilized Si evaporation by adhering metal film onto at least one surface of Si and by putting it onto a boat through heating.
COPYRIGHT: (C)1977,JPO&Japio
JP14398475A 1975-12-05 1975-12-05 Evaporation source Pending JPS5268384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14398475A JPS5268384A (en) 1975-12-05 1975-12-05 Evaporation source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14398475A JPS5268384A (en) 1975-12-05 1975-12-05 Evaporation source

Publications (1)

Publication Number Publication Date
JPS5268384A true JPS5268384A (en) 1977-06-07

Family

ID=15351595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14398475A Pending JPS5268384A (en) 1975-12-05 1975-12-05 Evaporation source

Country Status (1)

Country Link
JP (1) JPS5268384A (en)

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