JPS5259578A - Removal of boron containing film - Google Patents

Removal of boron containing film

Info

Publication number
JPS5259578A
JPS5259578A JP13537075A JP13537075A JPS5259578A JP S5259578 A JPS5259578 A JP S5259578A JP 13537075 A JP13537075 A JP 13537075A JP 13537075 A JP13537075 A JP 13537075A JP S5259578 A JPS5259578 A JP S5259578A
Authority
JP
Japan
Prior art keywords
removal
containing film
boron containing
hard
soluble film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13537075A
Other languages
English (en)
Other versions
JPS5943821B2 (ja
Inventor
Toshio Matsuda
Susumu Furuike
Ginjiro Kanbara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP13537075A priority Critical patent/JPS5943821B2/ja
Publication of JPS5259578A publication Critical patent/JPS5259578A/ja
Publication of JPS5943821B2 publication Critical patent/JPS5943821B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP13537075A 1975-11-10 1975-11-10 ホウソガンユウヒマクノジヨキヨホウホウ Expired JPS5943821B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13537075A JPS5943821B2 (ja) 1975-11-10 1975-11-10 ホウソガンユウヒマクノジヨキヨホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13537075A JPS5943821B2 (ja) 1975-11-10 1975-11-10 ホウソガンユウヒマクノジヨキヨホウホウ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59107525A Division JPS6016097B2 (ja) 1984-05-29 1984-05-29 ほう素含有被膜の除去方法

Publications (2)

Publication Number Publication Date
JPS5259578A true JPS5259578A (en) 1977-05-17
JPS5943821B2 JPS5943821B2 (ja) 1984-10-24

Family

ID=15150124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13537075A Expired JPS5943821B2 (ja) 1975-11-10 1975-11-10 ホウソガンユウヒマクノジヨキヨホウホウ

Country Status (1)

Country Link
JP (1) JPS5943821B2 (ja)

Also Published As

Publication number Publication date
JPS5943821B2 (ja) 1984-10-24

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