JPS5252879A - Tube for liquid phase epitaxial growth - Google Patents

Tube for liquid phase epitaxial growth

Info

Publication number
JPS5252879A
JPS5252879A JP12908875A JP12908875A JPS5252879A JP S5252879 A JPS5252879 A JP S5252879A JP 12908875 A JP12908875 A JP 12908875A JP 12908875 A JP12908875 A JP 12908875A JP S5252879 A JPS5252879 A JP S5252879A
Authority
JP
Japan
Prior art keywords
tube
epitaxial growth
liquid phase
phase epitaxial
gas chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12908875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS536107B2 (Direct
Inventor
Yoshiharu Horikoshi
Takeshi Kobayashi
Yoshitaka Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP12908875A priority Critical patent/JPS5252879A/ja
Publication of JPS5252879A publication Critical patent/JPS5252879A/ja
Publication of JPS536107B2 publication Critical patent/JPS536107B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP12908875A 1975-10-27 1975-10-27 Tube for liquid phase epitaxial growth Granted JPS5252879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12908875A JPS5252879A (en) 1975-10-27 1975-10-27 Tube for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12908875A JPS5252879A (en) 1975-10-27 1975-10-27 Tube for liquid phase epitaxial growth

Publications (2)

Publication Number Publication Date
JPS5252879A true JPS5252879A (en) 1977-04-28
JPS536107B2 JPS536107B2 (Direct) 1978-03-04

Family

ID=15000769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12908875A Granted JPS5252879A (en) 1975-10-27 1975-10-27 Tube for liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5252879A (Direct)

Also Published As

Publication number Publication date
JPS536107B2 (Direct) 1978-03-04

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