JPS5249991A - Sputtering method - Google Patents

Sputtering method

Info

Publication number
JPS5249991A
JPS5249991A JP50125711A JP12571175A JPS5249991A JP S5249991 A JPS5249991 A JP S5249991A JP 50125711 A JP50125711 A JP 50125711A JP 12571175 A JP12571175 A JP 12571175A JP S5249991 A JPS5249991 A JP S5249991A
Authority
JP
Japan
Prior art keywords
sputtering method
metal
intersurface
purifying
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50125711A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5540111B2 (enExample
Inventor
Toshio Sugawa
Takeshi Konuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50125711A priority Critical patent/JPS5249991A/ja
Publication of JPS5249991A publication Critical patent/JPS5249991A/ja
Publication of JPS5540111B2 publication Critical patent/JPS5540111B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrodes Of Semiconductors (AREA)
JP50125711A 1975-10-17 1975-10-17 Sputtering method Granted JPS5249991A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50125711A JPS5249991A (en) 1975-10-17 1975-10-17 Sputtering method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50125711A JPS5249991A (en) 1975-10-17 1975-10-17 Sputtering method

Publications (2)

Publication Number Publication Date
JPS5249991A true JPS5249991A (en) 1977-04-21
JPS5540111B2 JPS5540111B2 (enExample) 1980-10-15

Family

ID=14916839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50125711A Granted JPS5249991A (en) 1975-10-17 1975-10-17 Sputtering method

Country Status (1)

Country Link
JP (1) JPS5249991A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641640A (en) * 1979-09-14 1981-04-18 Hitachi Ltd Manufacture of image pick-up tube
JPS58200533A (ja) * 1982-04-30 1983-11-22 テキサス・インスツルメンツ・インコ−ポレイテツド 絶縁層の表面に金属層を付着する方法
JPH01144000A (ja) * 1987-11-30 1989-06-06 Toshiba Corp 放射性ガスの貯蔵法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60199138A (ja) * 1984-03-22 1985-10-08 塚田　一郎 コンクリ−ト穴形成法
JPS60199137A (ja) * 1984-03-22 1985-10-08 塚田　一郎 コンクリ−ト穴の形成方法
JPH03286068A (ja) * 1990-04-02 1991-12-17 Fujimori Kogyo Kk コンクリート打設用筒状型枠

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4923346A (enExample) * 1972-06-30 1974-03-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4923346A (enExample) * 1972-06-30 1974-03-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641640A (en) * 1979-09-14 1981-04-18 Hitachi Ltd Manufacture of image pick-up tube
JPS58200533A (ja) * 1982-04-30 1983-11-22 テキサス・インスツルメンツ・インコ−ポレイテツド 絶縁層の表面に金属層を付着する方法
JPH01144000A (ja) * 1987-11-30 1989-06-06 Toshiba Corp 放射性ガスの貯蔵法

Also Published As

Publication number Publication date
JPS5540111B2 (enExample) 1980-10-15

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