JPS5246799B2 - - Google Patents

Info

Publication number
JPS5246799B2
JPS5246799B2 JP48105119A JP10511973A JPS5246799B2 JP S5246799 B2 JPS5246799 B2 JP S5246799B2 JP 48105119 A JP48105119 A JP 48105119A JP 10511973 A JP10511973 A JP 10511973A JP S5246799 B2 JPS5246799 B2 JP S5246799B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48105119A
Other languages
Japanese (ja)
Other versions
JPS4975290A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4975290A publication Critical patent/JPS4975290A/ja
Publication of JPS5246799B2 publication Critical patent/JPS5246799B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H10W20/42
    • H10W20/01

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP48105119A 1972-10-27 1973-09-19 Expired JPS5246799B2 (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00301570A US3844831A (en) 1972-10-27 1972-10-27 Forming a compact multilevel interconnection metallurgy system for semi-conductor devices

Publications (2)

Publication Number Publication Date
JPS4975290A JPS4975290A (en:Method) 1974-07-19
JPS5246799B2 true JPS5246799B2 (en:Method) 1977-11-28

Family

ID=23163957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48105119A Expired JPS5246799B2 (en:Method) 1972-10-27 1973-09-19

Country Status (7)

Country Link
US (1) US3844831A (en:Method)
JP (1) JPS5246799B2 (en:Method)
CA (1) CA1089112A (en:Method)
DE (1) DE2346565C2 (en:Method)
FR (1) FR2204891B1 (en:Method)
GB (1) GB1433624A (en:Method)
IT (1) IT998625B (en:Method)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3983284A (en) * 1972-06-02 1976-09-28 Thomson-Csf Flat connection for a semiconductor multilayer structure
GB1468346A (en) * 1973-02-28 1977-03-23 Mullard Ltd Devices having conductive tracks at different levels with interconnections therebetween
US4045594A (en) * 1975-12-31 1977-08-30 Ibm Corporation Planar insulation of conductive patterns by chemical vapor deposition and sputtering
US4035276A (en) * 1976-04-29 1977-07-12 Ibm Corporation Making coplanar layers of thin films
US4029562A (en) * 1976-04-29 1977-06-14 Ibm Corporation Forming feedthrough connections for multi-level interconnections metallurgy systems
FR2350697A1 (fr) * 1976-05-06 1977-12-02 Cii Structure perfectionnee de circuits multicouches
DE2642471A1 (de) * 1976-09-21 1978-03-23 Siemens Ag Verfahren zur herstellung von mehrlagenverdrahtungen bei integrierten halbleiterschaltkreisen
DE2936724A1 (de) * 1978-09-11 1980-03-20 Tokyo Shibaura Electric Co Halbleitervorrichtung und verfahren zu ihrer herstellung
JPS5595340A (en) * 1979-01-10 1980-07-19 Chiyou Lsi Gijutsu Kenkyu Kumiai Preparation of semiconductor device
JPS55138868A (en) * 1979-04-17 1980-10-30 Toshiba Corp Bipolar integrated circuit and method of fabricating the same
JPS5643742A (en) * 1979-09-17 1981-04-22 Mitsubishi Electric Corp Manufacture of semiconductor
US4381595A (en) * 1979-10-09 1983-05-03 Mitsubishi Denki Kabushiki Kaisha Process for preparing multilayer interconnection
US4331700A (en) * 1979-11-30 1982-05-25 Rca Corporation Method of making a composite substrate
US4296272A (en) * 1979-11-30 1981-10-20 Rca Corporation Composite substrate
US4307179A (en) * 1980-07-03 1981-12-22 International Business Machines Corporation Planar metal interconnection system and process
US4452583A (en) * 1981-01-22 1984-06-05 Baker International Corporation Liquid hydrocarbon burning method and apparatus
US4423547A (en) 1981-06-01 1984-01-03 International Business Machines Corporation Method for forming dense multilevel interconnection metallurgy for semiconductor devices
DE3218309A1 (de) * 1982-05-14 1983-11-17 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von integrierten mos-feldeffekttransistoren mit einer aus metallsiliziden bestehenden zusaetzlichen leiterbahnebene
JPH0644593B2 (ja) * 1984-11-09 1994-06-08 株式会社東芝 半導体集積回路装置
JPS61170048A (ja) * 1985-01-23 1986-07-31 Nec Corp 半導体装置
US4777852A (en) * 1986-10-02 1988-10-18 Snap-On Tools Corporation Ratcheting screwdriver
JPS63240096A (ja) * 1987-03-27 1988-10-05 富士通株式会社 グリ−ンシ−ト多層法
AU6873791A (en) * 1989-11-16 1991-06-13 Polycon Corporation Hybrid circuit structure and methods of fabrication
US5282922A (en) * 1989-11-16 1994-02-01 Polycon Corporation Hybrid circuit structures and methods of fabrication
US5096124A (en) * 1990-10-05 1992-03-17 Halliburton Company Burner apparatus
US5453401A (en) * 1991-05-01 1995-09-26 Motorola, Inc. Method for reducing corrosion of a metal surface containing at least aluminum and copper
US5234769A (en) * 1992-04-16 1993-08-10 Deposition Sciences, Inc. Wear resistant transparent dielectric coatings
US5612254A (en) * 1992-06-29 1997-03-18 Intel Corporation Methods of forming an interconnect on a semiconductor substrate
US5739579A (en) * 1992-06-29 1998-04-14 Intel Corporation Method for forming interconnections for semiconductor fabrication and semiconductor device having such interconnections
US5416278A (en) 1993-03-01 1995-05-16 Motorola, Inc. Feedthrough via connection
US5413962A (en) * 1994-07-15 1995-05-09 United Microelectronics Corporation Multi-level conductor process in VLSI fabrication utilizing an air bridge
US5635423A (en) * 1994-10-11 1997-06-03 Advanced Micro Devices, Inc. Simplified dual damascene process for multi-level metallization and interconnection structure
US5736457A (en) * 1994-12-09 1998-04-07 Sematech Method of making a damascene metallization
TW408420B (en) * 1998-08-14 2000-10-11 Mosel Vitelic Inc A method to measure if the connecting via in the metal wiring layer is aligned correctly
CN117324381A (zh) * 2023-11-02 2024-01-02 北京工业大学 一种异温轧制制备铝/铝/钽三层复合材料的方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3290565A (en) * 1963-10-24 1966-12-06 Philco Corp Glass enclosed, passivated semiconductor with contact means of alternate layers of chromium, silver and chromium
US3266127A (en) * 1964-01-27 1966-08-16 Ibm Method of forming contacts on semiconductors
US3406043A (en) * 1964-11-09 1968-10-15 Western Electric Co Integrated circuit containing multilayer tantalum compounds
FR1496985A (fr) * 1965-10-19 1967-10-06 Sylvania Electric Prod Procédé de fabrication de semi-conducteurs munis de conducteurs de connexion et semi-conducteurs ainsi obtenus
US3597667A (en) * 1966-03-01 1971-08-03 Gen Electric Silicon oxide-silicon nitride coatings for semiconductor devices
US3641661A (en) * 1968-06-25 1972-02-15 Texas Instruments Inc Method of fabricating integrated circuit arrays
US3634929A (en) * 1968-11-02 1972-01-18 Tokyo Shibaura Electric Co Method of manufacturing semiconductor integrated circuits
GB1286737A (en) * 1969-10-15 1972-08-23 Itt Multilevel conductive systems
US3700508A (en) * 1970-06-25 1972-10-24 Gen Instrument Corp Fabrication of integrated microcircuit devices
US3760242A (en) * 1972-03-06 1973-09-18 Ibm Coated semiconductor structures and methods of forming protective coverings on such structures

Also Published As

Publication number Publication date
FR2204891A1 (en:Method) 1974-05-24
DE2346565C2 (de) 1983-11-10
IT998625B (it) 1976-02-20
CA1089112A (en) 1980-11-04
US3844831A (en) 1974-10-29
JPS4975290A (en:Method) 1974-07-19
GB1433624A (en) 1976-04-28
FR2204891B1 (en:Method) 1977-08-05
DE2346565A1 (de) 1974-05-02

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