JPS5246756A - Field-emission type electron gun - Google Patents

Field-emission type electron gun

Info

Publication number
JPS5246756A
JPS5246756A JP50121878A JP12187875A JPS5246756A JP S5246756 A JPS5246756 A JP S5246756A JP 50121878 A JP50121878 A JP 50121878A JP 12187875 A JP12187875 A JP 12187875A JP S5246756 A JPS5246756 A JP S5246756A
Authority
JP
Japan
Prior art keywords
field
electron gun
emission type
type electron
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50121878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5728181B2 (enrdf_load_stackoverflow
Inventor
Akimitsu Okura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50121878A priority Critical patent/JPS5246756A/ja
Publication of JPS5246756A publication Critical patent/JPS5246756A/ja
Publication of JPS5728181B2 publication Critical patent/JPS5728181B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP50121878A 1975-10-11 1975-10-11 Field-emission type electron gun Granted JPS5246756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50121878A JPS5246756A (en) 1975-10-11 1975-10-11 Field-emission type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50121878A JPS5246756A (en) 1975-10-11 1975-10-11 Field-emission type electron gun

Publications (2)

Publication Number Publication Date
JPS5246756A true JPS5246756A (en) 1977-04-13
JPS5728181B2 JPS5728181B2 (enrdf_load_stackoverflow) 1982-06-15

Family

ID=14822148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50121878A Granted JPS5246756A (en) 1975-10-11 1975-10-11 Field-emission type electron gun

Country Status (1)

Country Link
JP (1) JPS5246756A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57203453U (enrdf_load_stackoverflow) * 1981-06-22 1982-12-24
JPS58223246A (ja) * 1982-06-21 1983-12-24 Hitachi Ltd 電界放射電子銃
JP2007073521A (ja) * 2005-09-05 2007-03-22 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法
JP2010010125A (ja) * 2008-05-28 2010-01-14 Hitachi High-Technologies Corp 荷電粒子線装置
WO2011102077A1 (ja) * 2010-02-18 2011-08-25 株式会社 日立ハイテクノロジーズ 電界放出電子銃及びその制御方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956386U (ja) * 1982-10-06 1984-04-12 株式会社電業社機械製作所 暗渠式ポンプ取水槽の渦流防止装置
JPS61130800U (enrdf_load_stackoverflow) * 1985-02-05 1986-08-15

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49110261A (enrdf_load_stackoverflow) * 1973-02-21 1974-10-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49110261A (enrdf_load_stackoverflow) * 1973-02-21 1974-10-21

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57203453U (enrdf_load_stackoverflow) * 1981-06-22 1982-12-24
JPS58223246A (ja) * 1982-06-21 1983-12-24 Hitachi Ltd 電界放射電子銃
JP2007073521A (ja) * 2005-09-05 2007-03-22 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法
JP2009117394A (ja) * 2005-09-05 2009-05-28 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法
US7595490B2 (en) 2005-09-05 2009-09-29 Ict, Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh Charged particle beam emitting device and method for operating a charged particle beam emitting device
JP2010010125A (ja) * 2008-05-28 2010-01-14 Hitachi High-Technologies Corp 荷電粒子線装置
WO2011102077A1 (ja) * 2010-02-18 2011-08-25 株式会社 日立ハイテクノロジーズ 電界放出電子銃及びその制御方法
JP2011171088A (ja) * 2010-02-18 2011-09-01 Hitachi High-Technologies Corp 電界放出電子銃及びその制御方法

Also Published As

Publication number Publication date
JPS5728181B2 (enrdf_load_stackoverflow) 1982-06-15

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