JPS5232352A - Laser interference scale by "2 beam- 1 beam" optical system - Google Patents

Laser interference scale by "2 beam- 1 beam" optical system

Info

Publication number
JPS5232352A
JPS5232352A JP50107788A JP10778875A JPS5232352A JP S5232352 A JPS5232352 A JP S5232352A JP 50107788 A JP50107788 A JP 50107788A JP 10778875 A JP10778875 A JP 10778875A JP S5232352 A JPS5232352 A JP S5232352A
Authority
JP
Japan
Prior art keywords
optical system
laser interference
interference scale
calipus
objective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50107788A
Other languages
English (en)
Japanese (ja)
Other versions
JPS565322B2 (enExample
Inventor
Makoto Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KIKAI SHINKO KYOKAI
Original Assignee
KIKAI SHINKO KYOKAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KIKAI SHINKO KYOKAI filed Critical KIKAI SHINKO KYOKAI
Priority to JP50107788A priority Critical patent/JPS5232352A/ja
Publication of JPS5232352A publication Critical patent/JPS5232352A/ja
Publication of JPS565322B2 publication Critical patent/JPS565322B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP50107788A 1975-09-05 1975-09-05 Laser interference scale by "2 beam- 1 beam" optical system Granted JPS5232352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50107788A JPS5232352A (en) 1975-09-05 1975-09-05 Laser interference scale by "2 beam- 1 beam" optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50107788A JPS5232352A (en) 1975-09-05 1975-09-05 Laser interference scale by "2 beam- 1 beam" optical system

Publications (2)

Publication Number Publication Date
JPS5232352A true JPS5232352A (en) 1977-03-11
JPS565322B2 JPS565322B2 (enExample) 1981-02-04

Family

ID=14468031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50107788A Granted JPS5232352A (en) 1975-09-05 1975-09-05 Laser interference scale by "2 beam- 1 beam" optical system

Country Status (1)

Country Link
JP (1) JPS5232352A (enExample)

Also Published As

Publication number Publication date
JPS565322B2 (enExample) 1981-02-04

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