JPS565322B2 - - Google Patents
Info
- Publication number
- JPS565322B2 JPS565322B2 JP10778875A JP10778875A JPS565322B2 JP S565322 B2 JPS565322 B2 JP S565322B2 JP 10778875 A JP10778875 A JP 10778875A JP 10778875 A JP10778875 A JP 10778875A JP S565322 B2 JPS565322 B2 JP S565322B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50107788A JPS5232352A (en) | 1975-09-05 | 1975-09-05 | Laser interference scale by "2 beam- 1 beam" optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50107788A JPS5232352A (en) | 1975-09-05 | 1975-09-05 | Laser interference scale by "2 beam- 1 beam" optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5232352A JPS5232352A (en) | 1977-03-11 |
| JPS565322B2 true JPS565322B2 (enExample) | 1981-02-04 |
Family
ID=14468031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50107788A Granted JPS5232352A (en) | 1975-09-05 | 1975-09-05 | Laser interference scale by "2 beam- 1 beam" optical system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5232352A (enExample) |
-
1975
- 1975-09-05 JP JP50107788A patent/JPS5232352A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5232352A (en) | 1977-03-11 |