JPS5229477A - Multi-layer epitaxial growth method at liquid phase - Google Patents

Multi-layer epitaxial growth method at liquid phase

Info

Publication number
JPS5229477A
JPS5229477A JP10492775A JP10492775A JPS5229477A JP S5229477 A JPS5229477 A JP S5229477A JP 10492775 A JP10492775 A JP 10492775A JP 10492775 A JP10492775 A JP 10492775A JP S5229477 A JPS5229477 A JP S5229477A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
growth method
layer epitaxial
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10492775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5731559B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shoji Isozumi
Yasuo Mitani
Yorimitsu Nishitani
Yasuaki Komatsu
Takeshi Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10492775A priority Critical patent/JPS5229477A/ja
Publication of JPS5229477A publication Critical patent/JPS5229477A/ja
Publication of JPS5731559B2 publication Critical patent/JPS5731559B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP10492775A 1975-09-01 1975-09-01 Multi-layer epitaxial growth method at liquid phase Granted JPS5229477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10492775A JPS5229477A (en) 1975-09-01 1975-09-01 Multi-layer epitaxial growth method at liquid phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10492775A JPS5229477A (en) 1975-09-01 1975-09-01 Multi-layer epitaxial growth method at liquid phase

Publications (2)

Publication Number Publication Date
JPS5229477A true JPS5229477A (en) 1977-03-05
JPS5731559B2 JPS5731559B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-07-05

Family

ID=14393720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10492775A Granted JPS5229477A (en) 1975-09-01 1975-09-01 Multi-layer epitaxial growth method at liquid phase

Country Status (1)

Country Link
JP (1) JPS5229477A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5731559B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-07-05

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