JPS5225568A - Production method of semiconductor element - Google Patents
Production method of semiconductor elementInfo
- Publication number
- JPS5225568A JPS5225568A JP10123075A JP10123075A JPS5225568A JP S5225568 A JPS5225568 A JP S5225568A JP 10123075 A JP10123075 A JP 10123075A JP 10123075 A JP10123075 A JP 10123075A JP S5225568 A JPS5225568 A JP S5225568A
- Authority
- JP
- Japan
- Prior art keywords
- production method
- semiconductor element
- excellen
- reproducibility
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform the doping control with excellen reproducibility, by means of performing the qualitative analysis of the reactive agent before and after the reaction, thereby reducing its result into supply control.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10123075A JPS5225568A (en) | 1975-08-22 | 1975-08-22 | Production method of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10123075A JPS5225568A (en) | 1975-08-22 | 1975-08-22 | Production method of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5225568A true JPS5225568A (en) | 1977-02-25 |
Family
ID=14295086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10123075A Pending JPS5225568A (en) | 1975-08-22 | 1975-08-22 | Production method of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5225568A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6082505U (en) * | 1983-11-11 | 1985-06-07 | 三菱重工業株式会社 | Steam turbine bleed port structure |
-
1975
- 1975-08-22 JP JP10123075A patent/JPS5225568A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6082505U (en) * | 1983-11-11 | 1985-06-07 | 三菱重工業株式会社 | Steam turbine bleed port structure |
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