JPS5225568A - Production method of semiconductor element - Google Patents

Production method of semiconductor element

Info

Publication number
JPS5225568A
JPS5225568A JP10123075A JP10123075A JPS5225568A JP S5225568 A JPS5225568 A JP S5225568A JP 10123075 A JP10123075 A JP 10123075A JP 10123075 A JP10123075 A JP 10123075A JP S5225568 A JPS5225568 A JP S5225568A
Authority
JP
Japan
Prior art keywords
production method
semiconductor element
excellen
reproducibility
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10123075A
Other languages
Japanese (ja)
Inventor
Akira Shintani
Shinichi Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10123075A priority Critical patent/JPS5225568A/en
Publication of JPS5225568A publication Critical patent/JPS5225568A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform the doping control with excellen reproducibility, by means of performing the qualitative analysis of the reactive agent before and after the reaction, thereby reducing its result into supply control.
COPYRIGHT: (C)1977,JPO&Japio
JP10123075A 1975-08-22 1975-08-22 Production method of semiconductor element Pending JPS5225568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10123075A JPS5225568A (en) 1975-08-22 1975-08-22 Production method of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10123075A JPS5225568A (en) 1975-08-22 1975-08-22 Production method of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5225568A true JPS5225568A (en) 1977-02-25

Family

ID=14295086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10123075A Pending JPS5225568A (en) 1975-08-22 1975-08-22 Production method of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5225568A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082505U (en) * 1983-11-11 1985-06-07 三菱重工業株式会社 Steam turbine bleed port structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082505U (en) * 1983-11-11 1985-06-07 三菱重工業株式会社 Steam turbine bleed port structure

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