JPS5224472A - Semiconductor device process - Google Patents

Semiconductor device process

Info

Publication number
JPS5224472A
JPS5224472A JP10095275A JP10095275A JPS5224472A JP S5224472 A JPS5224472 A JP S5224472A JP 10095275 A JP10095275 A JP 10095275A JP 10095275 A JP10095275 A JP 10095275A JP S5224472 A JPS5224472 A JP S5224472A
Authority
JP
Japan
Prior art keywords
semiconductor device
device process
dsa
eliminating
dispersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10095275A
Other languages
Japanese (ja)
Inventor
Tadayoshi Mifune
Takashi Shimada
Akiyasu Ishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP10095275A priority Critical patent/JPS5224472A/en
Publication of JPS5224472A publication Critical patent/JPS5224472A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: In DSA-MOST, NF is improved by forming short channels well and eliminating Vp dispersion.
COPYRIGHT: (C)1977,JPO&Japio
JP10095275A 1975-08-20 1975-08-20 Semiconductor device process Pending JPS5224472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10095275A JPS5224472A (en) 1975-08-20 1975-08-20 Semiconductor device process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10095275A JPS5224472A (en) 1975-08-20 1975-08-20 Semiconductor device process

Publications (1)

Publication Number Publication Date
JPS5224472A true JPS5224472A (en) 1977-02-23

Family

ID=14287677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10095275A Pending JPS5224472A (en) 1975-08-20 1975-08-20 Semiconductor device process

Country Status (1)

Country Link
JP (1) JPS5224472A (en)

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