JPS5219983A - Manufacture process for a semiconductor integrated substrate - Google Patents

Manufacture process for a semiconductor integrated substrate

Info

Publication number
JPS5219983A
JPS5219983A JP9582475A JP9582475A JPS5219983A JP S5219983 A JPS5219983 A JP S5219983A JP 9582475 A JP9582475 A JP 9582475A JP 9582475 A JP9582475 A JP 9582475A JP S5219983 A JPS5219983 A JP S5219983A
Authority
JP
Japan
Prior art keywords
manufacture process
semiconductor integrated
integrated substrate
substrate
suporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9582475A
Other languages
Japanese (ja)
Other versions
JPS5722213B2 (en
Inventor
Takaya Suzuki
Akio Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9582475A priority Critical patent/JPS5219983A/en
Publication of JPS5219983A publication Critical patent/JPS5219983A/en
Publication of JPS5722213B2 publication Critical patent/JPS5722213B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: A manufacture process for a substrate which wouldn't be curved when it is treated with variable high temperature heat working, and he some polycrystal suporting layers such as a conductive isolation substrate and so.
COPYRIGHT: (C)1977,JPO&Japio
JP9582475A 1975-08-08 1975-08-08 Manufacture process for a semiconductor integrated substrate Granted JPS5219983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9582475A JPS5219983A (en) 1975-08-08 1975-08-08 Manufacture process for a semiconductor integrated substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9582475A JPS5219983A (en) 1975-08-08 1975-08-08 Manufacture process for a semiconductor integrated substrate

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP11907981A Division JPS5756944A (en) 1981-07-31 1981-07-31 Substrate for semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS5219983A true JPS5219983A (en) 1977-02-15
JPS5722213B2 JPS5722213B2 (en) 1982-05-12

Family

ID=14148144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9582475A Granted JPS5219983A (en) 1975-08-08 1975-08-08 Manufacture process for a semiconductor integrated substrate

Country Status (1)

Country Link
JP (1) JPS5219983A (en)

Also Published As

Publication number Publication date
JPS5722213B2 (en) 1982-05-12

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