JPS5215277B2 - - Google Patents

Info

Publication number
JPS5215277B2
JPS5215277B2 JP1561273A JP1561273A JPS5215277B2 JP S5215277 B2 JPS5215277 B2 JP S5215277B2 JP 1561273 A JP1561273 A JP 1561273A JP 1561273 A JP1561273 A JP 1561273A JP S5215277 B2 JPS5215277 B2 JP S5215277B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1561273A
Other languages
Japanese (ja)
Other versions
JPS49104888A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1561273A priority Critical patent/JPS5215277B2/ja
Publication of JPS49104888A publication Critical patent/JPS49104888A/ja
Publication of JPS5215277B2 publication Critical patent/JPS5215277B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Inorganic Insulating Materials (AREA)
JP1561273A 1973-02-09 1973-02-09 Expired JPS5215277B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1561273A JPS5215277B2 (enrdf_load_stackoverflow) 1973-02-09 1973-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1561273A JPS5215277B2 (enrdf_load_stackoverflow) 1973-02-09 1973-02-09

Publications (2)

Publication Number Publication Date
JPS49104888A JPS49104888A (enrdf_load_stackoverflow) 1974-10-03
JPS5215277B2 true JPS5215277B2 (enrdf_load_stackoverflow) 1977-04-27

Family

ID=11893514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1561273A Expired JPS5215277B2 (enrdf_load_stackoverflow) 1973-02-09 1973-02-09

Country Status (1)

Country Link
JP (1) JPS5215277B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114476U (enrdf_load_stackoverflow) * 1980-02-04 1981-09-03
JPS63191090A (ja) * 1987-02-03 1988-08-08 Tokyo Electron Ltd 複合光センサ
JPH0656313A (ja) * 1991-05-14 1994-03-01 Fuji Xerox Co Ltd シート検出装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51103440A (enrdf_load_stackoverflow) * 1975-03-10 1976-09-13 Oki Electric Ind Co Ltd
JPS6164875A (ja) * 1984-09-06 1986-04-03 Ulvac Corp 合金薄膜形成方法
JPH11152561A (ja) * 1997-11-20 1999-06-08 Toray Ind Inc 電子ビーム蒸着装置およびこれを用いた薄膜の製造方法
JP5637120B2 (ja) * 2011-11-15 2014-12-10 三菱電機株式会社 蒸着装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114476U (enrdf_load_stackoverflow) * 1980-02-04 1981-09-03
JPS63191090A (ja) * 1987-02-03 1988-08-08 Tokyo Electron Ltd 複合光センサ
JPH0656313A (ja) * 1991-05-14 1994-03-01 Fuji Xerox Co Ltd シート検出装置

Also Published As

Publication number Publication date
JPS49104888A (enrdf_load_stackoverflow) 1974-10-03

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