JPS49104888A - - Google Patents
Info
- Publication number
- JPS49104888A JPS49104888A JP1561273A JP1561273A JPS49104888A JP S49104888 A JPS49104888 A JP S49104888A JP 1561273 A JP1561273 A JP 1561273A JP 1561273 A JP1561273 A JP 1561273A JP S49104888 A JPS49104888 A JP S49104888A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1561273A JPS5215277B2 (enrdf_load_stackoverflow) | 1973-02-09 | 1973-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1561273A JPS5215277B2 (enrdf_load_stackoverflow) | 1973-02-09 | 1973-02-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49104888A true JPS49104888A (enrdf_load_stackoverflow) | 1974-10-03 |
| JPS5215277B2 JPS5215277B2 (enrdf_load_stackoverflow) | 1977-04-27 |
Family
ID=11893514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1561273A Expired JPS5215277B2 (enrdf_load_stackoverflow) | 1973-02-09 | 1973-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5215277B2 (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51103440A (enrdf_load_stackoverflow) * | 1975-03-10 | 1976-09-13 | Oki Electric Ind Co Ltd | |
| JPS6164875A (ja) * | 1984-09-06 | 1986-04-03 | Ulvac Corp | 合金薄膜形成方法 |
| WO1999027149A1 (fr) * | 1997-11-20 | 1999-06-03 | Toray Industries, Inc. | Dispositif de depot par faisceaux d'electrons et procede de fabrication de couches minces a l'aide de ce dispositif |
| JP2013104106A (ja) * | 2011-11-15 | 2013-05-30 | Mitsubishi Electric Corp | 蒸着装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56114476U (enrdf_load_stackoverflow) * | 1980-02-04 | 1981-09-03 | ||
| JPS63191090A (ja) * | 1987-02-03 | 1988-08-08 | Tokyo Electron Ltd | 複合光センサ |
| JPH0656313A (ja) * | 1991-05-14 | 1994-03-01 | Fuji Xerox Co Ltd | シート検出装置 |
-
1973
- 1973-02-09 JP JP1561273A patent/JPS5215277B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51103440A (enrdf_load_stackoverflow) * | 1975-03-10 | 1976-09-13 | Oki Electric Ind Co Ltd | |
| JPS6164875A (ja) * | 1984-09-06 | 1986-04-03 | Ulvac Corp | 合金薄膜形成方法 |
| WO1999027149A1 (fr) * | 1997-11-20 | 1999-06-03 | Toray Industries, Inc. | Dispositif de depot par faisceaux d'electrons et procede de fabrication de couches minces a l'aide de ce dispositif |
| JP2013104106A (ja) * | 2011-11-15 | 2013-05-30 | Mitsubishi Electric Corp | 蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5215277B2 (enrdf_load_stackoverflow) | 1977-04-27 |