JPS52150688A - Solid ion source - Google Patents
Solid ion sourceInfo
- Publication number
- JPS52150688A JPS52150688A JP6653576A JP6653576A JPS52150688A JP S52150688 A JPS52150688 A JP S52150688A JP 6653576 A JP6653576 A JP 6653576A JP 6653576 A JP6653576 A JP 6653576A JP S52150688 A JPS52150688 A JP S52150688A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ion source
- solid ion
- apply
- injection method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Particle Accelerators (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51066535A JPS593814B2 (ja) | 1976-06-09 | 1976-06-09 | 固体イオン源 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51066535A JPS593814B2 (ja) | 1976-06-09 | 1976-06-09 | 固体イオン源 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52150688A true JPS52150688A (en) | 1977-12-14 |
JPS593814B2 JPS593814B2 (ja) | 1984-01-26 |
Family
ID=13318673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51066535A Expired JPS593814B2 (ja) | 1976-06-09 | 1976-06-09 | 固体イオン源 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS593814B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59160941A (ja) * | 1984-02-17 | 1984-09-11 | Hitachi Ltd | イオン源 |
JPS59167944A (ja) * | 1984-03-07 | 1984-09-21 | Hitachi Ltd | デユオプラズマトロン形イオン源 |
JPS6041736A (ja) * | 1984-07-02 | 1985-03-05 | Hitachi Ltd | イオン源 |
JPH03219539A (ja) * | 1989-10-27 | 1991-09-26 | Tokyo Electron Ltd | イオン生成方法およびイオン生成装置 |
-
1976
- 1976-06-09 JP JP51066535A patent/JPS593814B2/ja not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59160941A (ja) * | 1984-02-17 | 1984-09-11 | Hitachi Ltd | イオン源 |
JPS6363105B2 (ja) * | 1984-02-17 | 1988-12-06 | ||
JPS59167944A (ja) * | 1984-03-07 | 1984-09-21 | Hitachi Ltd | デユオプラズマトロン形イオン源 |
JPS6041736A (ja) * | 1984-07-02 | 1985-03-05 | Hitachi Ltd | イオン源 |
JPH03219539A (ja) * | 1989-10-27 | 1991-09-26 | Tokyo Electron Ltd | イオン生成方法およびイオン生成装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS593814B2 (ja) | 1984-01-26 |
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