JPS52150688A - Solid ion source - Google Patents

Solid ion source

Info

Publication number
JPS52150688A
JPS52150688A JP6653576A JP6653576A JPS52150688A JP S52150688 A JPS52150688 A JP S52150688A JP 6653576 A JP6653576 A JP 6653576A JP 6653576 A JP6653576 A JP 6653576A JP S52150688 A JPS52150688 A JP S52150688A
Authority
JP
Japan
Prior art keywords
ion
ion source
solid ion
apply
injection method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6653576A
Other languages
English (en)
Other versions
JPS593814B2 (ja
Inventor
Hifumi Tamura
Toru Ishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51066535A priority Critical patent/JPS593814B2/ja
Publication of JPS52150688A publication Critical patent/JPS52150688A/ja
Publication of JPS593814B2 publication Critical patent/JPS593814B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Particle Accelerators (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP51066535A 1976-06-09 1976-06-09 固体イオン源 Expired JPS593814B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51066535A JPS593814B2 (ja) 1976-06-09 1976-06-09 固体イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51066535A JPS593814B2 (ja) 1976-06-09 1976-06-09 固体イオン源

Publications (2)

Publication Number Publication Date
JPS52150688A true JPS52150688A (en) 1977-12-14
JPS593814B2 JPS593814B2 (ja) 1984-01-26

Family

ID=13318673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51066535A Expired JPS593814B2 (ja) 1976-06-09 1976-06-09 固体イオン源

Country Status (1)

Country Link
JP (1) JPS593814B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59160941A (ja) * 1984-02-17 1984-09-11 Hitachi Ltd イオン源
JPS59167944A (ja) * 1984-03-07 1984-09-21 Hitachi Ltd デユオプラズマトロン形イオン源
JPS6041736A (ja) * 1984-07-02 1985-03-05 Hitachi Ltd イオン源
JPH03219539A (ja) * 1989-10-27 1991-09-26 Tokyo Electron Ltd イオン生成方法およびイオン生成装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59160941A (ja) * 1984-02-17 1984-09-11 Hitachi Ltd イオン源
JPS6363105B2 (ja) * 1984-02-17 1988-12-06
JPS59167944A (ja) * 1984-03-07 1984-09-21 Hitachi Ltd デユオプラズマトロン形イオン源
JPS6041736A (ja) * 1984-07-02 1985-03-05 Hitachi Ltd イオン源
JPH03219539A (ja) * 1989-10-27 1991-09-26 Tokyo Electron Ltd イオン生成方法およびイオン生成装置

Also Published As

Publication number Publication date
JPS593814B2 (ja) 1984-01-26

Similar Documents

Publication Publication Date Title
JPS5439191A (en) Oxygen detector
JPS52150688A (en) Solid ion source
JPS5239366A (en) Electronic gun device
JPS521364A (en) Toggle
JPS524500A (en) Recoverring method of ammonium sulfate from waste solution
JPS52182A (en) Method of forming planar type fet electrodes
JPS52101984A (en) Preparation of semiconductor device
JPS5239365A (en) Electronic gun device
JPS5223581A (en) Antifreeze composition and production process for same
JPS529491A (en) Internal electrode
JPS52127179A (en) Manufacturing method of semiconductor device
JPS51117231A (en) Air-fuel ratio control system
JPS52129275A (en) Impurity diffusion method
JPS53115172A (en) Ion implanting method
JPS52117578A (en) Electron beam exposing method
JPS51113754A (en) Method for finding the center of ultra-large, spherical tanks
JPS5387164A (en) Heat traetment method of compound crystal
JPS5210879A (en) Fluorescent substances
JPS5271972A (en) Acceleration tube
JPS523490A (en) Monitor of radiation energy
JPS51117978A (en) Electrode
JPS5240394A (en) Method of measureing moisture in solid
JPS5334589A (en) Dropping rod for potting confinement
JPS52141561A (en) Ion injection
JPS51146696A (en) Ion-beam stabilization method