JPS51146696A - Ion-beam stabilization method - Google Patents
Ion-beam stabilization methodInfo
- Publication number
- JPS51146696A JPS51146696A JP50069087A JP6908775A JPS51146696A JP S51146696 A JPS51146696 A JP S51146696A JP 50069087 A JP50069087 A JP 50069087A JP 6908775 A JP6908775 A JP 6908775A JP S51146696 A JPS51146696 A JP S51146696A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- stabilization method
- beam stabilization
- current
- beam current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Particle Accelerators (AREA)
Abstract
PURPOSE: To stabilize ion-beam current by controlling discharge current, etc. with difference of ion-beam setting value and ion-beam current obtained.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50069087A JPS51146696A (en) | 1975-06-10 | 1975-06-10 | Ion-beam stabilization method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50069087A JPS51146696A (en) | 1975-06-10 | 1975-06-10 | Ion-beam stabilization method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51146696A true JPS51146696A (en) | 1976-12-16 |
Family
ID=13392445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50069087A Pending JPS51146696A (en) | 1975-06-10 | 1975-06-10 | Ion-beam stabilization method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51146696A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04101396A (en) * | 1990-08-17 | 1992-04-02 | Ebara Corp | Voltage controller and electron beam accelerator using it |
-
1975
- 1975-06-10 JP JP50069087A patent/JPS51146696A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04101396A (en) * | 1990-08-17 | 1992-04-02 | Ebara Corp | Voltage controller and electron beam accelerator using it |
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