JPS51146696A - Ion-beam stabilization method - Google Patents

Ion-beam stabilization method

Info

Publication number
JPS51146696A
JPS51146696A JP50069087A JP6908775A JPS51146696A JP S51146696 A JPS51146696 A JP S51146696A JP 50069087 A JP50069087 A JP 50069087A JP 6908775 A JP6908775 A JP 6908775A JP S51146696 A JPS51146696 A JP S51146696A
Authority
JP
Japan
Prior art keywords
ion
stabilization method
beam stabilization
current
beam current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50069087A
Other languages
Japanese (ja)
Inventor
Keizo Shimizu
Kyuzo Kawakatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50069087A priority Critical patent/JPS51146696A/en
Publication of JPS51146696A publication Critical patent/JPS51146696A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Particle Accelerators (AREA)

Abstract

PURPOSE: To stabilize ion-beam current by controlling discharge current, etc. with difference of ion-beam setting value and ion-beam current obtained.
COPYRIGHT: (C)1976,JPO&Japio
JP50069087A 1975-06-10 1975-06-10 Ion-beam stabilization method Pending JPS51146696A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50069087A JPS51146696A (en) 1975-06-10 1975-06-10 Ion-beam stabilization method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50069087A JPS51146696A (en) 1975-06-10 1975-06-10 Ion-beam stabilization method

Publications (1)

Publication Number Publication Date
JPS51146696A true JPS51146696A (en) 1976-12-16

Family

ID=13392445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50069087A Pending JPS51146696A (en) 1975-06-10 1975-06-10 Ion-beam stabilization method

Country Status (1)

Country Link
JP (1) JPS51146696A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04101396A (en) * 1990-08-17 1992-04-02 Ebara Corp Voltage controller and electron beam accelerator using it

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04101396A (en) * 1990-08-17 1992-04-02 Ebara Corp Voltage controller and electron beam accelerator using it

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