JPS52149480A - Evaluation and apparatus of convvering films - Google Patents

Evaluation and apparatus of convvering films

Info

Publication number
JPS52149480A
JPS52149480A JP6622076A JP6622076A JPS52149480A JP S52149480 A JPS52149480 A JP S52149480A JP 6622076 A JP6622076 A JP 6622076A JP 6622076 A JP6622076 A JP 6622076A JP S52149480 A JPS52149480 A JP S52149480A
Authority
JP
Japan
Prior art keywords
evaluation
convvering
films
utilizing
etching solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6622076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS542826B2 (enExample
Inventor
Hitoshi Nagano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6622076A priority Critical patent/JPS52149480A/ja
Publication of JPS52149480A publication Critical patent/JPS52149480A/ja
Publication of JPS542826B2 publication Critical patent/JPS542826B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP6622076A 1976-06-07 1976-06-07 Evaluation and apparatus of convvering films Granted JPS52149480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6622076A JPS52149480A (en) 1976-06-07 1976-06-07 Evaluation and apparatus of convvering films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6622076A JPS52149480A (en) 1976-06-07 1976-06-07 Evaluation and apparatus of convvering films

Publications (2)

Publication Number Publication Date
JPS52149480A true JPS52149480A (en) 1977-12-12
JPS542826B2 JPS542826B2 (enExample) 1979-02-14

Family

ID=13309521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6622076A Granted JPS52149480A (en) 1976-06-07 1976-06-07 Evaluation and apparatus of convvering films

Country Status (1)

Country Link
JP (1) JPS52149480A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4870482A (enExample) * 1971-12-23 1973-09-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4870482A (enExample) * 1971-12-23 1973-09-25

Also Published As

Publication number Publication date
JPS542826B2 (enExample) 1979-02-14

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