JPS52142976A - Production of semiconductor integrated circuit device - Google Patents

Production of semiconductor integrated circuit device

Info

Publication number
JPS52142976A
JPS52142976A JP6023976A JP6023976A JPS52142976A JP S52142976 A JPS52142976 A JP S52142976A JP 6023976 A JP6023976 A JP 6023976A JP 6023976 A JP6023976 A JP 6023976A JP S52142976 A JPS52142976 A JP S52142976A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
circuit device
improvement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6023976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5528221B2 (enExample
Inventor
Saburo Osaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6023976A priority Critical patent/JPS52142976A/ja
Publication of JPS52142976A publication Critical patent/JPS52142976A/ja
Publication of JPS5528221B2 publication Critical patent/JPS5528221B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP6023976A 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device Granted JPS52142976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6023976A JPS52142976A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6023976A JPS52142976A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS52142976A true JPS52142976A (en) 1977-11-29
JPS5528221B2 JPS5528221B2 (enExample) 1980-07-26

Family

ID=13136416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6023976A Granted JPS52142976A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS52142976A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03171348A (ja) * 1989-11-30 1991-07-24 Mita Ind Co Ltd メモリチェック装置

Also Published As

Publication number Publication date
JPS5528221B2 (enExample) 1980-07-26

Similar Documents

Publication Publication Date Title
JPS52106279A (en) Manufacture of semiconductor ic
JPS5342659A (en) Semiconductor integrated circuit
JPS51118391A (en) Manufacturing process for semiconducter unit
JPS52127179A (en) Manufacturing method of semiconductor device
JPS52153383A (en) Preparation of semiconductor device
JPS51147184A (en) Method of mawufacturing of mosic circuit device
JPS5252370A (en) Fabrication of glass-sealed semiconductor device
JPS52102661A (en) Phase control circuit and application for osillation circuit
JPS546461A (en) Manufacture of semiconductor device
JPS5266368A (en) Semiconductor logic circuit
JPS533311A (en) Clock control circuit
JPS5363866A (en) Production of semiconductor device
JPS51112266A (en) Semiconductor device production method
JPS53140976A (en) Semiconductor device
JPS5310288A (en) Semiconductor integrated circuit
JPS5335386A (en) Production of semiconductor device
JPS5354493A (en) Electronic watch
JPS5267580A (en) Semiconductor integrated circuit and manufacturing method thereof
JPS5424574A (en) Manufacture for semiconductor device
JPS51147968A (en) Method of manufacturing semiconductor device
JPS5343448A (en) Lsi sequence control circuit
JPS51151088A (en) Manufacturing method of a semiconductor integrated circuit apparatus
JPS52156573A (en) Production of semiconductor device
JPS536578A (en) Production of semiconductor device
JPS5278384A (en) Production of semiconductor integrated circuit device