JPS52139387A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52139387A
JPS52139387A JP5543076A JP5543076A JPS52139387A JP S52139387 A JPS52139387 A JP S52139387A JP 5543076 A JP5543076 A JP 5543076A JP 5543076 A JP5543076 A JP 5543076A JP S52139387 A JPS52139387 A JP S52139387A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
island
serrations
wirings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5543076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5519064B2 (enExample
Inventor
Hiroyuki Tango
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP5543076A priority Critical patent/JPS52139387A/ja
Publication of JPS52139387A publication Critical patent/JPS52139387A/ja
Publication of JPS5519064B2 publication Critical patent/JPS5519064B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
JP5543076A 1976-05-17 1976-05-17 Production of semiconductor device Granted JPS52139387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5543076A JPS52139387A (en) 1976-05-17 1976-05-17 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5543076A JPS52139387A (en) 1976-05-17 1976-05-17 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52139387A true JPS52139387A (en) 1977-11-21
JPS5519064B2 JPS5519064B2 (enExample) 1980-05-23

Family

ID=12998359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5543076A Granted JPS52139387A (en) 1976-05-17 1976-05-17 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52139387A (enExample)

Also Published As

Publication number Publication date
JPS5519064B2 (enExample) 1980-05-23

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